ArticleSensors (Basel, Switzerland)2021
A Semi-Linear Elliptic Model for a Circular Membrane MEMS Device Considering the Effect of the Fringing Field.
Article in Sensors (Basel, Switzerland), 2021. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 6 papers.
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6 citing papers in PubMed.
- Numerical Approaches for Recovering the Deformable Membrane Profile of Electrostatic Microdevices for Biomedical Applications.Sensors (Basel, Switzerland) · 2023Article
- A Fuzzy Similarity-Based Approach to Classify Numerically Simulated and Experimentally Detected Carbon Fiber-Reinforced Polymer Plate Defects.Sensors (Basel, Switzerland) · 2022Article
- Microelectromechanical Systems Based on Magnetic Polymer Films.Micromachines · 2022Review
- Coupled Finite Element-Finite Volume Multi-Physics Analysis of MEMS Electrothermal Actuators.Micromachines · 2021Article
- Analysis of Four Types of Anchorage Devices for Prestressed Glulam Beam and Experimental Research.Materials (Basel, Switzerland) · 2021Article
- Transparent and Flexible Vibration Sensor Based on a Wheel-Shaped Hybrid Thin Membrane.Micromachines · 2021Article
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4 authors.
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Abstract
In this study, an accurate analytic semi-linear elliptic differential model for a circular membrane MEMS device, which considers the effect of the fringing field on the membrane curvature recovering, is presented. A novel algebraic condition, related to the membrane electromechanical properties, able to govern the uniqueness of the solution, is also demonstrated. Numerical results for the membrane profile, obtained by using the Shooting techniques, the Keller-Box scheme, and the III/IV Stage Lobatto IIIa formulas, have been carried out, and their performances have been compared. The convergence conditions, and the possible presence of ghost solutions, have been evaluated and discussed. Finally, a practical criterion for choosing the membrane material as a function of the MEMS specific application is presented.
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