Evidence map›Paper›PMID 34285866›Full record

ReviewBeilstein journal of nanotechnology2021

A review of defect engineering, ion implantation, and nanofabrication using the helium ion microscope.

Frances I Allen

Open access · diamondAbstract readReview
In one paragraph

Review in Beilstein journal of nanotechnology, 2021. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 13 papers.

0numbers the graph read from it
0cells of the map it votes in
13citing papers in PubMed
4.7field-weighted citation impact, top 4% of its field
1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

13 citing papers in PubMed, 64 citations in OpenAlex.

  1. Developments in Nanopatterning of Graphene; Toward Direct Writing.Advanced materials (Deerfield Beach, Fla.) · 2026
    Review
  2. Article
  3. Article
  4. Article
  5. Article
  6. Electroluminescent vertical tunneling junctions based on WSeProceedings of the National Academy of Sciences of the United States of America · 2024
    Article
  7. Ion-induced surface reactions and deposition from Pt(CO)Beilstein journal of nanotechnology · 2024
    Article
  8. Article
  9. Article
  10. Article
  11. Article
  12. Article
  13. Review
4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

1 author at 1 institution in 1 country.

Frances I AllenDepartment of Materials Science and Engineering, University of California, Berkeley, CA 94720, USA.ORCID https://orcid.org/0000-0002-0311-8624
QB3 · US

Funding

No grant is acknowledged in the PubMed record.

6 · The paper itself

Abstract

The helium ion microscope has emerged as a multifaceted instrument enabling a broad range of applications beyond imaging in which the finely focused helium ion beam is used for a variety of defect engineering, ion implantation, and nanofabrication tasks. Operation of the ion source with neon has extended the reach of this technology even further. This paper reviews the materials modification research that has been enabled by the helium ion microscope since its commercialization in 2007, ranging from fundamental studies of beam-sample effects, to the prototyping of new devices with features in the sub-10 nm domain.

Indexed as

defect engineeringfocused helium ion beam-induced depositionfocused helium ion beam millinghelium ion beam lithographyhelium ion implantation

Identifiers

PMID34285866
PMCPMC8261528
OpenAlexW3186705974

What OpenQuestion holds

Textmetadata
LicenceCC BY
Read underepoch 390

Registered trials

None linked

Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.