ArticleMicromachines2021
Large-Area and Ultrathin MEMS Mirror Using Silicon Micro Rim.
Myeong-Su Ahn et al.PubMed ↗Full text ↗Publisher ↗
No numbers read from the abstract.
2 papers cite it
this papercites it
ArticleMicromachines2021
Myeong-Su Ahn et al.PubMed ↗Full text ↗Publisher ↗
No numbers read from the abstract.