ReviewMicromachines2021
The Recent Progress of MEMS/NEMS Resonators.
Review in Micromachines, 2021. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 11 papers.
What it found
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The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.
The trial behind it
Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.
Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.
Who cites it
11 citing papers in PubMed, 78 citations in OpenAlex.
- Robust structural superlubric interfaces under high current density, from understandings to applications.Microsystems & nanoengineering · 2026Article
- Impact of Surface Effects on Support-Loss Mechanisms in Micro-/Nano-Beam Resonators.Nanomaterials (Basel, Switzerland) · 2026Article
- Precision Nanometrology: Laser Interferometer, Grating Interferometer and Time Grating Sensor.Sensors (Basel, Switzerland) · 2025Review
- Closed-Loop Resonant Density Sensor Design Using Electromagnetic Excitation and Magnetic Detection.Sensors (Basel, Switzerland) · 2025Article
- Silicon-based MEMS/NEMS empowered by graphene: a scheme for large tunability and functionality.Microsystems & nanoengineering · 2025Article
- A Novel Closed-Loop Single-Channel Time Division Multiplexing Detection Circuit for Hemispherical Resonator Gyroscope.Micromachines · 2025Article
- Application of Surface Stress-Driven Model for Higher Vibration Modes of Functionally Graded Nanobeams.Nanomaterials (Basel, Switzerland) · 2024Article
- Recent Progress in Micro- and Nanotechnology-Enabled Sensors for Biomedical and Environmental Challenges.Sensors (Basel, Switzerland) · 2023Review
- Design and Optimization of Hemispherical Resonators Based on PSO-BP and NSGA-II.Micromachines · 2023Article
- Analysis of Size-Dependent Linear Static Bending, Buckling, and Free Vibration Based on a Modified Couple Stress Theory.Materials (Basel, Switzerland) · 2022Article
- A Cascaded MEMS Amplitude Demodulator for Large Dynamic Range Application in RF Receiver.Micromachines · 2021Article
Corrections and comments
PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.
Authors and funding
9 authors at 2 institutions in 1 country.
Funding
Abstract
MEMS/NEMS resonators are widely studied in biological detection, physical sensing, and quantum coupling. This paper reviews the latest research progress of MEMS/NEMS resonators with different structures. The resonance performance, new test method, and manufacturing process of single or double-clamped resonators, and their applications in mass sensing, micromechanical thermal analysis, quantum detection, and oscillators are introduced in detail. The material properties, resonance mode, and application in different fields such as gyroscope of the hemispherical structure, microdisk structure, drum resonator are reviewed. Furthermore, the working principles and sensing methods of the surface acoustic wave and bulk acoustic wave resonators and their new applications such as humidity sensing and fast spin control are discussed. The structure and resonance performance of tuning forks are summarized. This article aims to classify resonators according to different structures and summarize the working principles, resonance performance, and applications.
Indexed as
Identifiers
What OpenQuestion holds
Registered trials
Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.