Evidence map›Paper›PMID 34162923›Full record

ArticleScientific reports2021

Influence of plasma treatment on SiO

R Lukose, M Lisker, F Akhtar, M Fraschke, T Grabolla, A Mai, M Lukosius

Erratum issuedOpen access · goldAbstract read
In one paragraph

Article in Scientific reports, 2021. The graph could read no effect estimate from its abstract, so it casts no vote on the map. An erratum has been issued. Cited by 13 papers.

0numbers the graph read from it
0cells of the map it votes in
13citing papers in PubMed
2.5field-weighted citation impact, top 10% of its field
1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

13 citing papers in PubMed, 61 citations in OpenAlex.

  1. Article
  2. Article
  3. Article
  4. 3D Lithiophilic Freestanding Hosts with SiOSmall (Weinheim an der Bergstrasse, Germany) · 2025
    Article
  5. Article
  6. Article
  7. Advances in Plasma and Laser Engineering.Materials (Basel, Switzerland) · 2024
    Article
  8. Article
  9. Article
  10. Article
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  13. Article
4 · The record

Corrections and comments

5 · Who and what money

Authors and funding

7 authors at 1 institution in 1 country.

R LukoseIHP- Leibniz Institut für innovative Mikroelektronik, Im Technologiepark 25, 15236, Frankfurt (Oder), Germany. lukose@ihp-microelectronics.com.
M LiskerIHP- Leibniz Institut für innovative Mikroelektronik, Im Technologiepark 25, 15236, Frankfurt (Oder), Germany.
F AkhtarIHP- Leibniz Institut für innovative Mikroelektronik, Im Technologiepark 25, 15236, Frankfurt (Oder), Germany.
M FraschkeIHP- Leibniz Institut für innovative Mikroelektronik, Im Technologiepark 25, 15236, Frankfurt (Oder), Germany.
T GrabollaIHP- Leibniz Institut für innovative Mikroelektronik, Im Technologiepark 25, 15236, Frankfurt (Oder), Germany.
A MaiIHP- Leibniz Institut für innovative Mikroelektronik, Im Technologiepark 25, 15236, Frankfurt (Oder), Germany.
M LukosiusIHP- Leibniz Institut für innovative Mikroelektronik, Im Technologiepark 25, 15236, Frankfurt (Oder), Germany.
Innovations for High Performance Microelectronics · DE

Funding

European Union's Horizon 2020 research and innovation programme-Graphene Flagship No 952792Federal Ministry of Education and Research (BMBF) Germany GIMMIK No 03XP0210EMinistry's policy for science, research and culture (MWFK)-StaF-Guideline.under the state budget regulations of Brandenburg and the associated administrative regulations.This funding is co-financed with funds from the European Regional Development Fund (ERDF) GETiT No 85038097
6 · The paper itself

Abstract

One of the limiting factors of graphene integration into electronic, photonic, or sensing devices is the unavailability of large-scale graphene directly grown on the isolators. Therefore, it is necessary to transfer graphene from the donor growth wafers onto the isolating target wafers. In the present research, graphene was transferred from the chemical vapor deposited 200 mm Germanium/Silicon (Ge/Si) wafers onto isolating (SiO

Identifiers

PMID34162923
PMCPMC8222355
OpenAlexW3175976863

What OpenQuestion holds

Textmetadata
LicenceCC BY
Read underepoch 390

Registered trials

None linked

Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.