ArticleScience advances2021
Dynamic piezoelectric MEMS-based optical metasurfaces.
Article in Science advances, 2021. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 35 papers.
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The trial behind it
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Who cites it
35 citing papers in PubMed.
- All-optical accelerometer enabled by metasurface.Science advances · 2026Article
- A high-resolution polarization-hyperspectral image sensor for complex intelligent sensing.Nature communications · 2026Article
- Metasurface-controlled high-speed tunable external cavity lasers.Science advances · 2026Article
- Mid-IR light modulators enabled by dynamically tunable ultra-high-Q silicon membrane metasurfaces.Nature communications · 2026Article
- Ultrafast, reconfigurable all-optical beam steering and spatial light modulation.Nature nanotechnology · 2026Article
- Electrically Tunable Meta-Waveplate Enabled by SbMicromachines · 2026Article
- Subarray programmable terahertz metasurface for optical logic and high-order amplitude modulation.Light, science & applications · 2026Article
- Advances in Metamaterials: Structure, Properties and Applications.Materials (Basel, Switzerland) · 2025Article
- Single-gate electro-optic beam switching metasurfaces.Light, science & applications · 2025Article
- A dual-mode LiDAR system enabled by mechanically tunable hybrid cascaded metasurfaces.Light, science & applications · 2025Article
- Article
- Electrochemically mutable soft metasurfaces.Nature materials · 2025Article
- Using light to image millimeter wave based on stacked meta-MEMS chip.Light, science & applications · 2025Article
- A Review of Cascaded Metasurfaces for Advanced Integrated Devices.Micromachines · 2024Review
- Dynamic Wavelength-Selective Diffraction and Absorption with Direct-Patterned Hydrogel Metagrating.Advanced science (Weinheim, Baden-Wurttemberg, Germany) · 2024Article
- MEMS-metasurface-enabled mode-switchable vortex lasers.Science advances · 2024Article
- Unidirectional Chiral Emission via Twisted Bi-layer Metasurfaces.Nature communications · 2024Article
- Oxygen-defective electrostrictors for soft electromechanics.Science advances · 2024Article
- The rise of electrically tunable metasurfaces.Science advances · 2024Review
- Multitasking Integrated Metasurface for Electromagnetic Wave Modulation with Reflection, Transmission, and Absorption.Micromachines · 2024Article
Corrections and comments
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Authors and funding
8 authors.
Funding
No grant is acknowledged in the PubMed record.
Abstract
Optical metasurfaces (OMSs) have shown unprecedented capabilities for versatile wavefront manipulations at the subwavelength scale. However, most well-established OMSs are static, featuring well-defined optical responses determined by OMS configurations set during their fabrication, whereas dynamic OMS configurations investigated so far often exhibit specific limitations and reduced reconfigurability. Here, by combining a thin-film piezoelectric microelectromechanical system (MEMS) with a gap-surface plasmon-based OMS, we develop an electrically driven dynamic MEMS-OMS platform that offers controllable phase and amplitude modulation of the reflected light by finely actuating the MEMS mirror. Using this platform, we demonstrate MEMS-OMS components for polarization-independent beam steering and two-dimensional (2D) focusing with high modulation efficiencies (~50%), broadband operation (~20% near the operating wavelength of 800 nanometers), and fast responses (<0.4 milliseconds). The developed MEMS-OMS platform offers flexible solutions for realizing complex dynamic 2D wavefront manipulations that could be used in reconfigurable and adaptive optical networks and systems.
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Registered trials
Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.