ReviewNanomaterials (Basel, Switzerland)2021
Green Nanofabrication Opportunities in the Semiconductor Industry: A Life Cycle Perspective.
Review in Nanomaterials (Basel, Switzerland), 2021. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 14 papers.
What it found
Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.
The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.
The trial behind it
Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.
Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.
Who cites it
14 citing papers in PubMed.
- Sustainable AFM-Based Nanolithography on Chitosan Thin Films for 2.5D and 3D Nanostructure Fabrication.Nanomaterials (Basel, Switzerland) · 2026Article
- Lithography-free, Pd-based bimorph cantilever switches for zero-standby-power chemo-mechanical HMicrosystems & nanoengineering · 2026Article
- Geo-spatial prospective life cycle sustainability of InGaN and InGaP compound semiconductors.Scientific reports · 2026Article
- Water-Processable PVA-SbQ as an Eco-Friendly Photoreversible Dual-Tone Photoresist for Advanced Lithography.Chemistry, an Asian journal · 2026Article
- Aerosol Printing of 3D Conductive Microstructures via Precision Dot Modulation.Small (Weinheim an der Bergstrasse, Germany) · 2025Article
- From Printed Devices to Vertically Stacked, 3D Flexible Hybrid Systems.Advanced materials (Deerfield Beach, Fla.) · 2025Review
- Combined Swelling and Metal Infiltration: Advancing Block Copolymer Pattern Control for Nanopatterning Applications.ACS applied nano materials · 2025Article
- Article
- Wavelength-Dependent Shaping of Azopolymer Micropillars for Three-Dimensional Structure Control.ACS applied materials & interfaces · 2023Article
- Printed n- and p-Channel Transistors using Silicon Nanoribbons Enduring Electrical, Thermal, and Mechanical Stress.ACS applied materials & interfaces · 2023Article
- Proof of Concept for Sustainable Manufacturing of Neural Electrode Array for In Vivo Recording.Biosensors · 2023Article
- Advances in Nanofabrication Technology for Nutraceuticals: New Insights and Future Trends.Bioengineering (Basel, Switzerland) · 2022Review
- Room Temperature Fabrication of Macroporous Lignin Membranes for the Scalable Production of Black Silicon.Biomacromolecules · 2022Article
- A Content Review of Life Cycle Assessment of Nanomaterials: Current Practices, Challenges, and Future Prospects.Nanomaterials (Basel, Switzerland) · 2021Review
Corrections and comments
PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.
Authors and funding
2 authors.
Funding
Abstract
The turn of the 21st century heralded in the semiconductor age alongside the Anthropocene epoch, characterised by the ever-increasing human impact on the environment. The ecological consequences of semiconductor chip manufacturing are the most predominant within the electronics industry. This is due to current reliance upon large amounts of solvents, acids and gases that have numerous toxicological impacts. Management and assessment of hazardous chemicals is complicated by trade secrets and continual rapid change in the electronic manufacturing process. Of the many subprocesses involved in chip manufacturing, lithographic processes are of particular concern. Current developments in bottom-up lithography, such as directed self-assembly (DSA) of block copolymers (BCPs), are being considered as a next-generation technology for semiconductor chip production. These nanofabrication techniques present a novel opportunity for improving the sustainability of lithography by reducing the number of processing steps, energy and chemical waste products involved. At present, to the extent of our knowledge, there is no published life cycle assessment (LCA) evaluating the environmental impact of new bottom-up lithography versus conventional lithographic techniques. Quantification of this impact is central to verifying whether these new nanofabrication routes can replace conventional deposition techniques in industry as a more environmentally friendly option.
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What OpenQuestion holds
Registered trials
Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.