Evaporation of Ti/Cr/Ti Multilayer on Flexible Polyimide and Its Application for Strain Sensor.

Yu-Jen Hsiao, Ru-Li Lin, Hwi-Ming Wang, Cheng-Zhe Cai

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Article in Micromachines, 2021. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Not yet cited in PubMed.

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4 authors.

Yu-Jen HsiaoDepartment of Mechanical Engineering, Southern Taiwan University of Science and Technology, Tainan 710, Taiwan.ORCID 0000-0003-0862-6473

Ru-Li LinDepartment of Mechanical Engineering, Southern Taiwan University of Science and Technology, Tainan 710, Taiwan.

Hwi-Ming WangDepartment of Electrical Engineering, Southern Taiwan University of Science and Technology, Tainan 710, Taiwan.

Cheng-Zhe CaiDepartment of Mechanical Engineering, Southern Taiwan University of Science and Technology, Tainan 710, Taiwan.

Funding

Ministry of Science and Technology of Taiwan MOST 109-2622-E-218-002-CC2 and MOST 109-2221-E-218-003

6 · The paper itself

Abstract

A flexible Ti/Cr/Ti multilayer strain gauge have been successfully developed based on polyimide substrate. The pure Ti metal strain gauge have shown the hysteresis phenomenon at the relationship between resistance and strain during tensile test. The experimental results of multilayer strain gauge show that adding Cr interlayer can improve the recovery and stability of the sensing electrode. When the interlayer Cr thickness was increased from 0 to 70 nm, the resistance decreased from 27 to 8.8 kΩ. The gauge factor (GF) value also decreased from 4.24 to 2.31 with the increase in the thickness of Cr interlayer from 30 to 70 nm, and the hysteresis phenomenon disappeared gradually. The multilayer Ti/Cr/Ti film has feasible application for strain sensor.

Indexed as

evaporationpolyimidestrain gaugeTi/Cr/Ti multilayer

Identifiers

PMID33921553

DOI10.3390/mi12040456

PMCPMC8073819

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