ArticleMicromachines2021
Photothermal Optical Beam Steering Using Large Deformation Multi-Layer Thin Film Structures.
Article in Micromachines, 2021. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Not yet cited in PubMed.
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6 authors.
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Abstract
Photothermal actuation of microstructures remains an active area of research for microsystems that demand electrically isolated, remote, on-chip manipulation. In this study, large-deformation structures constructed from thin films traditional to microsystems were explored through both simulation and experiment as a rudimentary means to both steer and shape an incident light beam through photothermal actuation. A series of unit step infrared laser exposures were applied at increasing power levels to both uniformly symmetric and deliberately asymmetric absorptive structures with the intent of characterizing the photothermal tilt response. The results indicate that a small angle (<4° at ~74 W/cm
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