Evidence map›Paper›PMID 33919437›Full record

ReviewMicromachines2021

Fabrication of Functional Microdevices in SU-8 by Multi-Photon Lithography.

Pooria Golvari, Stephen M Kuebler

Abstract readReview
In one paragraph

Review in Micromachines, 2021. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 11 papers.

0numbers the graph read from it
0cells of the map it votes in
11citing papers in PubMed
–field-weighted citation impact
1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

11 citing papers in PubMed.

  1. Article
  2. Article
  3. Article
  4. Review
  5. Review
  6. Review
  7. Article
  8. Article
  9. Article
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  11. Article
4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

2 authors.

Pooria GolvariChemistry Department, University of Central Florida, Orlando, FL 32816, USA.ORCID 0000-0001-6369-006X
Stephen M KueblerChemistry Department, University of Central Florida, Orlando, FL 32816, USA.

Funding

National Science Foundation 1711356
6 · The paper itself

Abstract

This review surveys advances in the fabrication of functional microdevices by multi-photon lithography (MPL) using the SU-8 material system. Microdevices created by MPL in SU-8 have been key to progress in the fields of micro-fluidics, micro-electromechanical systems (MEMS), micro-robotics, and photonics. The review discusses components, properties, and processing of SU-8 within the context of MPL. Emphasis is focused on advances within the last five years, but the discussion also includes relevant developments outside this period in MPL and the processing of SU-8. Novel methods for improving resolution of MPL using SU-8 and discussed, along with methods for functionalizing structures after fabrication.

Indexed as

direct laser writingMEMSmetallizationmicro-fluidicsmicro-roboticsmulti-photon lithographySU-8

Identifiers

PMID33919437
PMCPMC8143355

What OpenQuestion holds

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LicenceCC BY
Read underepoch 390

Registered trials

None linked

Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.