ArticleNature materials2021
Three-dimensional nanolithography guided by DNA modular epitaxy.
Article in Nature materials, 2021. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 15 papers.
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Who cites it
15 citing papers in PubMed.
- Programming Dimensional Transitions in DNA Brick Crystals via Interfacial Connectivity.Angewandte Chemie (International ed. in English) · 2026Article
- Constructing and decoding tree-ring-like surface patterns on self-assembled polymer platelets.Nature communications · 2026Article
- Classifying Multistate DNA Origami: An Automated Approach with Minimal Labeling and Confidence-Based Filtering.Journal of chemical information and modeling · 2026Article
- Direct nanopatterning of complex 3D surfaces and self-aligned superlattices via molecular-beam holographic lithography.Nature communications · 2025Article
- 3D Nanofabrication via Directed Material Assembly: Mechanism, Method, and Future.Advanced materials (Deerfield Beach, Fla.) · 2025Review
- Interplay of graphene-DNA interactions: Unveiling sensing potential of graphene materials.Applied physics reviews · 2024Article
- Site-directed placement of three-dimensional DNA origami.Nature nanotechnology · 2023Article
- Biotemplated precise assembly approach toward ultra-scaled high-performance electronics.Nature protocols · 2023Review
- Accelerating the characterization of dynamic DNA origami devices with deep neural networks.Scientific reports · 2023Article
- Prime factorization via localized tile assembly in a DNA origami framework.Science advances · 2023Article
- Harnessing DNA Nanotechnology and Chemistry for Applications in Photonics and Electronics.Bioconjugate chemistry · 2023Review
- Dynamics of DNA Origami Lattices.Bioconjugate chemistry · 2023Review
- Advancing the Utility of DNA Origami Technique through Enhanced Stability of DNA-Origami-Based Assemblies.Bioconjugate chemistry · 2023Review
- Suppressing high-dimensional crystallographic defects for ultra-scaled DNA arrays.Nature communications · 2022Article
- Engineering Inorganic Materials with DNA Nanostructures.ACS central science · 2021Review
Corrections and comments
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Authors and funding
5 authors.
Funding
No grant is acknowledged in the PubMed record.
Abstract
Lithographic scaling of periodic three-dimensional patterns is critical for advancing scalable nanomanufacturing. Current state-of-the-art quadruple patterning or extreme-ultraviolet lithography produce a line pitch down to around 30 nm, which might be further scaled to sub-20 nm through complex post-fabrication processes. Herein, we report the use of three-dimensional (3D) DNA nanostructures to scale the line pitch down to 16.2 nm, around 50% smaller than state-of-the-art results. We use a DNA modular epitaxy approach to fabricate 3D DNA masks with prescribed structural parameters (geometry, pitch and critical dimensions) along a designer assembly pathway. Single-run reactive ion etching then transfers the DNA patterns to a Si substrate at a lateral critical dimension of 7 nm and a vertical critical dimension of 2 nm. The nanolithography guided by DNA modular epitaxy achieves a smaller pitch than the projected values for advanced technology nodes in field-effect transistors, and provides a potential complement to the existing lithographic tools for advanced 3D nanomanufacturing.
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Registered trials
Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.