ArticleScientific reports2021
Challenges in nanofabrication for efficient optical metasurfaces.
Article in Scientific reports, 2021. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 10 papers.
What it found
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The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.
The trial behind it
Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.
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Who cites it
10 citing papers in PubMed.
- Suppressing laser-power noise with a multifunctional liquid crystal polarization grating in miniaturized optically pumped magnetometers.Microsystems & nanoengineering · 2026Article
- Article
- Phase Characterization of Singular Metasurfaces.ACS photonics · 2025Article
- Design and performance analysis of all-dielectric reflective, metalens for LWIR applications.Scientific reports · 2025Article
- Hybrid Nonlinear Metasurface Refractive Lens.Nano letters · 2025Article
- Electrically Controlled Metal-Insulator Heterogeneous Evolution for Infrared Switch and Perfect Absorption.Advanced science (Weinheim, Baden-Wurttemberg, Germany) · 2025Article
- An Angle- and Polarization-Selective Dual-Wavelength Narrowband Thermal Emitter for Infrared Multilevel Encryption.Research (Washington, D.C.) · 2025Article
- Article
- Crafting chirality in three dimensions via a novel fabrication technique for bound states in the continuum metasurfaces.Light, science & applications · 2024Article
- Special scattering regimes for conical all-dielectric nanoparticles.Scientific reports · 2022Article
Corrections and comments
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Authors and funding
9 authors.
Funding
No grant is acknowledged in the PubMed record.
Abstract
Optical metasurfaces have raised immense expectations as cheaper and lighter alternatives to bulk optical components. In recent years, novel components combining multiple optical functions have been proposed pushing further the level of requirement on the manufacturing precision of these objects. In this work, we study in details the influence of the most common fabrication errors on the optical response of a metasurface and quantitatively assess the tolerance to fabrication errors based on extensive numerical simulations. We illustrate these results with the design, fabrication and characterization of a silicon nanoresonator-based metasurface that operates as a beam deflector in the near-infrared range.
Identifiers
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Registered trials
Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.