Application of the MEMS Accelerometer as the Position Sensor in Linear Electrohydraulic Drive.

Various distance sensors are used as measuring elements for positioning linear electrohydraulic drives. The most common are magnetostrictive transducers or linear variable differential transformer (LVDT) sensors mounted inside the cylinder. The displacement of the actuator's piston rod is proportional to the change in the value of the current or voltage at the output from the sensor. They are characterized by relatively low measurement noise. The disadvantage of presented sensors is the need to mount them inside the cylinders and the high price. The article presents preliminary research on the replacement of following sensors and the use of a microelectromechanical system (MEMS) accelerometer as a measuring element in the electrohydraulic drive control system. The control consisted of two phases: at first, the signal from the acceleration sensor was analyzed during the actuator movement, based on the value determined from the simplified model implemented on the controller. In the range of motion in which the dynamics were the lowest, the signal was integrated and the obtained value was used in the second phase of motion. In the correction phase, a new set point was determined. Conducting the research required building a dedicated research stand. The author conducted the simulation and experimental research.