ArticleMicromachines2021
Effects of Thermal Annealing on Femtosecond Laser Micromachined Glass Surfaces.
Article in Micromachines, 2021. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 8 papers.
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Who cites it
8 citing papers in PubMed.
- Machine Learning-Based Prediction of Ablation Groove Geometry and Heat-Affected Zone Formation in Femtosecond Laser Micromachining of Aluminum.Materials (Basel, Switzerland) · 2026Article
- The route to microstructures with optical quality glass surfaces by fs laser ablation.Scientific reports · 2025Article
- Femtosecond laser microfabrication of a fully-integrated optofluidic device for 3D imaging flow cytometry.Scientific reports · 2025Article
- A monolithic microfluidic probe for ambient mass spectrometry imaging of biological tissues.Lab on a chip · 2023Article
- Combined Femtosecond Laser Glass Microprocessing for Liver-on-Chip Device Fabrication.Materials (Basel, Switzerland) · 2023Article
- Femtosecond Laser Assisted 3D Etching Using Inorganic-Organic Etchant.Materials (Basel, Switzerland) · 2022Article
- Editorial for the Special Issue on New Trends and Applications in Femtosecond Laser Micromachining.Micromachines · 2022Article
- Femtosecond laser hybrid processing strategy of transparent hard and brittle materials.Frontiers in chemistry · 2022Review
Corrections and comments
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Authors and funding
5 authors.
Funding
Abstract
Femtosecond laser micromachining (FLM) of fused silica allows for the realization of three-dimensional embedded optical elements and microchannels with micrometric feature size. The performances of these components are strongly affected by the machined surface quality and residual roughness. The polishing of 3D buried structures in glass was demonstrated using different thermal annealing processes, but precise control of the residual roughness obtained with this technique is still missing. In this work, we investigate how the FLM irradiation parameters affect surface roughness and we characterize the improvement of surface quality after thermal annealing. As a result, we achieved a strong roughness reduction, from an average value of 49 nm down to 19 nm. As a proof of concept, we studied the imaging performances of embedded mirrors before and after thermal polishing, showing the capacity to preserve a minimum feature size of the reflected image lower than μ5μm. These results allow for us to push forward the capabilities of this enabling fabrication technology, and they can be used as a starting point to improve the performances of more complex optical elements, such as hollow waveguides or micro-lenses.
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Registered trials
Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.