An Integrated Evanescent Field Sensor for the Simultaneous Measurement of Layer Refractive Index and Thickness.

Matthias Jäger, Jürgen Bruns, Jessica Schneidewind, Cay Pinnow, Hassan Gargouri, Klaus Petermann

Abstract read

In one paragraph

Article in Sensors (Basel, Switzerland), 2021. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Not yet cited in PubMed.

0numbers the graph read from it

0cells of the map it votes in

0citing papers in PubMed

–field-weighted citation impact

1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

0 citing papers in PubMed.

No citing paper in PubMed yet.

4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

6 authors.

Matthias JägerFachgebiet Hochfrequenztechnik/Photonik, HFT4, Technische Universität Berlin, 10587 Berlin, Germany.ORCID 0000-0003-4932-4594

Jürgen BrunsFachgebiet Hochfrequenztechnik/Photonik, HFT4, Technische Universität Berlin, 10587 Berlin, Germany.

Jessica SchneidewindPlasma Process Technology group, SENTECH Instruments GmbH, 12489 Berlin, Germany.

Cay PinnowPlasma Process Technology group, SENTECH Instruments GmbH, 12489 Berlin, Germany.

Hassan GargouriPlasma Process Technology group, SENTECH Instruments GmbH, 12489 Berlin, Germany.

Klaus PetermannFachgebiet Hochfrequenztechnik/Photonik, HFT4, Technische Universität Berlin, 10587 Berlin, Germany.

Funding

Deutsche Forschungsgemeinschaft DFG PE 319/32-1European Regional Development Fund 10147150Investitionsbank Berlin (IBB) 10147150

6 · The paper itself

Abstract

A novel integrated sensor for the simultaneous measurement of layer refractive index and thickness based on evanescent fields is proposed. The theoretical limits for the accuracy of the sensor were examined for the example of a TiO2 layer. The influence of production tolerance on the accuracy was evaluated. In the experimental part of this work, a sensor chip containing nanowire and nanorib waveguides realized in silicon on insulator technology was used to demonstrate the detection of refractive index and thickness of a TiO2 atomic layer deposition (ALD) layer.

Indexed as

refractive index sensingring resonatorsilicon on insulator (SOI)silicon photonics

Identifiers

PMID33652576

DOI10.3390/s21051628

PMCPMC7956392

What OpenQuestion holds

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Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.