Evidence map›Paper›PMID 33562626›Full record

ArticleSensors (Basel, Switzerland)2021

Defect Filling Method of Sensor Encapsulation Based on Micro-Nano Composite Structure with Parylene Coating.

Jialin Yao, Wenjiang Qiang, Xingqi Guo, Hanshui Fan, Yushuang Zheng, Yan Xu, Xing Yang

Open access · goldAbstract read
In one paragraph

Article in Sensors (Basel, Switzerland), 2021. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 2 papers.

0numbers the graph read from it
0cells of the map it votes in
2citing papers in PubMed
0.8field-weighted citation impact, top 33% of its field
1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

2 citing papers in PubMed, 15 citations in OpenAlex.

  1. Review
  2. Article
4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

7 authors at 2 institutions in 1 country.

Jialin YaoThe State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instrument, Tsinghua University, Beijing 100084, China.
Wenjiang QiangSchool of Materials Science and Engineering, University of Science and Technology Beijing, Beijing 100083, China.
Xingqi GuoThe State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instrument, Tsinghua University, Beijing 100084, China.
Hanshui FanSchool of Materials Science and Engineering, University of Science and Technology Beijing, Beijing 100083, China.
Yushuang ZhengSchool of Materials Science and Engineering, University of Science and Technology Beijing, Beijing 100083, China.
Yan XuSchool of Materials Science and Engineering, University of Science and Technology Beijing, Beijing 100083, China.
Xing YangThe State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instrument, Tsinghua University, Beijing 100084, China.
University of Science and Technology Beijing · CNTsinghua University · CN

Funding

the Capital Transformational Medicine Project 2018-2Z-4086the National Natural Science Foundation of China Project 31427801the National Natural Science Foundation of China Project 61671271
6 · The paper itself

Abstract

The demand for waterproofing of polymer (parylene) coating encapsulation has increased in a wide variety of applications, especially in the waterproof protection of electronic devices. However, parylene coatings often produce pinholes and cracks, which will reduce the waterproof effect as a protective barrier. This characteristic has a more significant influence on sensors and actuators with movable parts. Thus, a defect filling method of micro-nano composite structure is proposed to improve the waterproof ability of parylene coatings. The defect filling method is composed of a nano layer of Al

Indexed as

composite structuredefect filling methodMEMSparylene coatingspressure sensors

Identifiers

PMID33562626
PMCPMC7915482
OpenAlexW3126970557

What OpenQuestion holds

Textmetadata
LicenceCC BY
Read underepoch 390

Registered trials

None linked

Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.