ReviewNanoscale research letters2021
A Review of Actuation and Sensing Mechanisms in MEMS-Based Sensor Devices.
Review in Nanoscale research letters, 2021. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 72 papers.
What it found
Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.
The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.
The trial behind it
Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.
Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.
Who cites it
72 citing papers in PubMed.
- Robust structural superlubric interfaces under high current density, from understandings to applications.Microsystems & nanoengineering · 2026Article
- Giant piezoelectric response and electromechanical coupling in AlScN thin films via multi-scale lattice engineering.Nature communications · 2026Article
- High speed biaxial piezoelectric MEMS micromirror with varifocal tunability.Microsystems & nanoengineering · 2026Article
- Mid-infrared wearable biosensing for metabolic syndrome: Opportunities and translational challenges.iScience · 2026Review
- A high-resolution electrostatically actuated MEMS Fabry-Pérot tunable filter for LWIR imaging and sensing applications.Microsystems & nanoengineering · 2026Article
- A Hybrid Preprocessing Multi-Objective Surrogate Model for Thermal MEMS Actuators.Micromachines · 2026Article
- Wearable sensors for respiratory protection in occupational settings.Journal of safety research · 2026Review
- Skin-like micropumps transform human motion into fluidic flow via morphing valves.Microsystems & nanoengineering · 2026Article
- From Fixed-Frequency to Tunable: Advances in Acoustic Sensors for Physiological Acoustic Monitoring.Sensors (Basel, Switzerland) · 2026Review
- Element-Free Galerkin Method for Analyzing Size-Dependent Thermally Induced Free Vibration Characteristics of Functionally Graded Magneto-Electro-Elastic Doubly Curved Microscale Shells.Materials (Basel, Switzerland) · 2026Article
- A Frequency-Aware Self-Supervised Framework for MEMS-OCT Denoising.Biosensors · 2026Article
- Recent Advances in MEMS Actuators for Microfluidic Applications: Emerging Designs, Multiphysics Modeling, and Performance Optimization.Micromachines · 2026Review
- 3D Customized Silica-Based AFM Probes Fabricated by Selective Laser Etching.Small methods · 2026Article
- Electrostatically actuated MEMS resonators for magnetic and electric field sensing: a review.Microsystems & nanoengineering · 2026Review
- Identification of Mechanical Parameters of the Silicon Structure of a Capacitive MEMS Accelerometer.Materials (Basel, Switzerland) · 2025Article
- A tactile gripper on an optical fiber for perception and actuation.Nature communications · 2025Article
- Review of Hydrogen Sensors in Aerobic and Anaerobic Environments Coupled with Artificial Intelligence Tools.Sensors (Basel, Switzerland) · 2025Review
- Article
- Rational Design and Fabrication of MEMS Gas Sensors With Long-Term Stability: A Comprehensive Review.Advanced science (Weinheim, Baden-Wurttemberg, Germany) · 2025Review
- Recent progress in aluminum nitride for piezoelectric MEMS mirror applications: enhancements with scandium doping.Microsystems & nanoengineering · 2025Review
12 more citing papers are in PubMed but not listed here.
Corrections and comments
PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.
Authors and funding
7 authors.
Funding
Abstract
Over the last couple of decades, the advancement in Microelectromechanical System (MEMS) devices is highly demanded for integrating the economically miniaturized sensors with fabricating technology. A sensor is a system that detects and responds to multiple physical inputs and converting them into analogue or digital forms. The sensor transforms these variations into a form which can be utilized as a marker to monitor the device variable. MEMS exhibits excellent feasibility in miniaturization sensors due to its small dimension, low power consumption, superior performance, and, batch-fabrication. This article presents the recent developments in standard actuation and sensing mechanisms that can serve MEMS-based devices, which is expected to revolutionize almost many product categories in the current era. The featured principles of actuating, sensing mechanisms and real-life applications have also been discussed. Proper understanding of the actuating and sensing mechanisms for the MEMS-based devices can play a vital role in effective selection for novel and complex application design.
Indexed as
Identifiers
What OpenQuestion holds
Registered trials
Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.