ReviewNanomaterials (Basel, Switzerland)2021
Role of Nanoimprint Lithography for Strongly Miniaturized Optical Spectrometers.
Review in Nanomaterials (Basel, Switzerland), 2021. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 4 papers.
What it found
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The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.
The trial behind it
Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.
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Who cites it
4 citing papers in PubMed.
- A Review of Optical Interferometry for High-Precision Length Measurement.Micromachines · 2024Review
- Microfluidics on lensless, semiconductor optical image sensors: challenges and opportunities for democratization of biosensing at the micro-and nano-scale.Nanophotonics (Berlin, Germany) · 2023Review
- A Spectroscopic Reflectance-Based Low-Cost Thickness Measurement System for Thin Films: Development and Testing.Sensors (Basel, Switzerland) · 2023Article
- Article
Corrections and comments
PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.
Authors and funding
8 authors.
Funding
No grant is acknowledged in the PubMed record.
Abstract
Optical spectrometers and sensors have gained enormous importance in metrology and information technology, frequently involving the question of size, resolution, sensitivity, spectral range, efficiency, reliability, and cost. Nanomaterials and nanotechnological fabrication technologies have huge potential to enable an optimization between these demands, which in some cases are counteracting each other. This paper focuses on the visible and near infrared spectral range and on five types of optical sensors (optical spectrometers): classical grating-based miniaturized spectrometers, arrayed waveguide grating devices, static Fabry-Pérot (FP) filter arrays on sensor arrays, tunable microelectromechanical systems (MEMS) FP filter arrays, and MEMS tunable photonic crystal filters. The comparison between this selection of concepts concentrates on (i) linewidth and resolution, (ii) required space for a selected spectral range, (iii) efficiency in using available light, and (iv) potential of nanoimprint for cost reduction and yield increase. The main part of this review deals with our own results in the field of static FP filter arrays and MEMS tunable FP filter arrays. In addition, technology for efficiency boosting to get more of the available light is demonstrated.
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Registered trials
Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.