ArticleNanomaterials (Basel, Switzerland)2020

Impact of Inductively Coupled Plasma Etching Conditions on the Formation of Semi-Polar ( 11 2 ¯ 2 ) and Non-Polar ( 11 2 ¯ 0 ) GaN Nanorods.

Pierre-Marie Coulon et al.PubMed ↗Full text ↗Publisher ↗

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