ArticleMicromachines2020
Preparation of Microneedle Array Mold Based on MEMS Lithography Technology.
Article in Micromachines, 2020. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 14 papers.
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Who cites it
14 citing papers in PubMed, 46 citations in OpenAlex.
- The Influence of Mask Modification on Microneedle Strength in Deep X-Ray Lithography.Micromachines · 2026Article
- Rational Design and Responsive Transdermal Cargo Delivery of Microneedles in the Treatment of Melanoma.International journal of nanomedicine · 2026Review
- Electrochemical Microneedles for Real-Time Monitoring in Interstitial Fluid: Emerging Technologies and Future Directions.Biosensors · 2025Review
- Hollow microneedles as a flexible dosing control solution for transdermal drug delivery.Materials today. Bio · 2025Review
- Therapeutic Potential of Microneedle Assisted Drug Delivery for Wound Healing: Current State of the Art, Challenges, and Future Perspective.AAPS PharmSciTech · 2025Review
- Advancements in Materials for 3D-Printed Microneedle Arrays: Enhancing Performance and Biocompatibility.Micromachines · 2024Review
- Machine Learning Assists in the Design and Application of Microneedles.Biomimetics (Basel, Switzerland) · 2024Review
- A Facile Method for the Fabrication of the Microneedle Electrode and Its Application in the Enzymatic Determination of Glutamate.Biosensors · 2023Article
- The Effect of 3D Printing Tilt Angle on the Penetration of 3D-Printed Microneedle Arrays.Micromachines · 2023Article
- Microneedles for Efficient and Precise Drug Delivery in Cancer Therapy.Pharmaceutics · 2023Review
- Flexible Monitoring, Diagnosis, and Therapy by Microneedles with Versatile Materials and Devices toward Multifunction Scope.Research (Washington, D.C.) · 2023Review
- Electropolishing and Shaping of Micro-Scale Metallic Features.Micromachines · 2022Review
- Utilization of Melt Fracture Phenomenon for the Preparation of Shark Skin Structured Hydrophobic Film.Polymers · 2021Article
- An overview of microneedle applications, materials, and fabrication methods.Beilstein journal of nanotechnology · 2021Review
Corrections and comments
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Authors and funding
4 authors at 1 institution in 1 country.
Funding
Abstract
As a transdermal drug delivery technology, microneedle array (MNA) has the characteristics of painless, minimally invasive, and precise dosage. This work discusses and compares the new MNA mold prepared by our group using MEMS technology. First, we introduced the planar pattern-to-cross-section technology (PCT) method using LIGA (Photolithography, Galvanogormung, Abformung) technology to obtain a three-dimensional structure similar to an X-ray mask pattern. On this basis, combined with polydimethylsiloxane (PDMS) transfer technology and electroplating process, metal MNA can be prepared. The second method is to use silicon wet etching combined with the SU-8 process to obtain a PDMS quadrangular pyramid MNA using PDMS transfer technology. Third method is to use the tilting rotary lithography process to obtain PDMS conical MNA on SU-8 photoresist through PDMS transfer technology. All three processes utilize parallel subtractive manufacturing methods, and the error range of reproducibility and accuracy is 2-11%. LIGA technology produces hollow MNA with an aspect ratio of up to 30, which is used for blood extraction and drug injection. The height of the MNA prepared by the engraving process is about 600 μm, which can achieve a sustained release effect together with a potential systemic delivery. The height of the MNA prepared by the ultraviolet exposure process is about 150 μm, which is used to stimulate the subcutaneous tissue.
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Registered trials
Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.