ArticleSensors (Basel, Switzerland)2020
Modeling the Piezoelectric Cantilever Resonator with Different Width Layers.
Article in Sensors (Basel, Switzerland), 2020. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 4 papers.
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4 citing papers in PubMed.
- A review of piezoelectric MEMS sensors and actuators for gas detection application.Discover nano · 2023Review
- Application of Smart Materials in the Actuation System of a Gas Injector.Materials (Basel, Switzerland) · 2021Article
- Investigation of the Near-Tip Stress Field of a Notch Terminating at a Bi-Material Interface.Materials (Basel, Switzerland) · 2021Article
- Development of Piezoelectric Energy Harvester System through Optimizing Multiple Structural Parameters.Sensors (Basel, Switzerland) · 2021Article
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3 authors.
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Abstract
The piezoelectric cantilever resonator is used widely in many fields because of its perfect design, easy-to-control process, easy integration with the integrated circuit. The tip displacement and resonance frequency are two important characters of the piezoelectric cantilever resonator and many models are used to characterize them. However, these models are only suitable for the piezoelectric cantilever with the same width layers. To accurately characterize the piezoelectric cantilever resonators with different width layers, a novel model is proposed for predicting the tip displacement and resonance frequency. The results show that the model is in good agreement with the finite element method (FEM) simulation and experiment measurements, the tip displacement error is no more than 6%, the errors of the first, second, and third-order resonance frequency between theoretical values and measured results are 1.63%, 1.18%, and 0.51%, respectively. Finally, a discussion of the tip displacement of the piezoelectric cantilever resonator when the second layer is null, electrode, or silicon oxide (SiO
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