ArticleMaterials (Basel, Switzerland)2020
Clean-Room Lithographical Processes for the Fabrication of Graphene Biosensors.
Article in Materials (Basel, Switzerland), 2020. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 12 papers.
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Who cites it
12 citing papers in PubMed.
- A Graphene Field-Effect Transistor-Based Biosensor Platform for the Electrochemical Profiling of Amino Acids.Biosensors · 2026Article
- Wafer-Level Fabrication of Radiofrequency Devices Featuring 2D Materials Integration.Nanomaterials (Basel, Switzerland) · 2025Article
- Modular Fabrication of Microfluidic Graphene FET for Nucleic Acids Biosensing.Advanced science (Weinheim, Baden-Wurttemberg, Germany) · 2024Article
- Process Development of a Liquid-Gated Graphene Field-Effect Transistor Gas Sensor for Applications in Smart Agriculture.Sensors (Basel, Switzerland) · 2024Article
- Bending Stability of Ferroelectric Gated Graphene Field Effect Transistor for Flexible Electronics.Materials (Basel, Switzerland) · 2023Article
- Integrated Approach from Sample-to-Answer for Grapevine Varietal Identification on a Portable Graphene Sensor Chip.ACS sensors · 2023Article
- Ultrasensitive dopamine detection with graphene aptasensor multitransistor arrays.Journal of nanobiotechnology · 2022Article
- Laser-Induced Graphene-Functionalized Field-Effect Transistor-Based Biosensing: A Potent Candidate for COVID-19 Detection.IEEE transactions on nanobioscience · 2022Review
- Optimizing PMMA solutions to suppress contamination in the transfer of CVD graphene for batch production.Beilstein journal of nanotechnology · 2022Article
- Numerical Evaluation of the Effect of Geometric Tolerances on the High-Frequency Performance of Graphene Field-Effect Transistors.Nanomaterials (Basel, Switzerland) · 2021Article
- 2D Electronics Based on Graphene Field Effect Transistors: Tutorial for Modelling and Simulation.Micromachines · 2021Review
- Efficient ReSeNanomaterials (Basel, Switzerland) · 2021Article
Corrections and comments
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Authors and funding
9 authors.
Funding
Abstract
This work is on developing clean-room processes for the fabrication of electrolyte-gate graphene field-effect transistors at the wafer scale for biosensing applications. Our fabrication process overcomes two main issues: removing surface residues after graphene patterning and the dielectric passivation of metallic contacts. A graphene residue-free transfer process is achieved by using a pre-transfer, sacrificial metallic mask that protects the entire wafer except the areas around the channel, source, and drain, onto which the graphene film is transferred and later patterned. After the dissolution of the mask, clean gate electrodes are obtained. The multilayer SiO
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