ArticleScientific reports2020
Multiscale simulation of the focused electron beam induced deposition process.
Article in Scientific reports, 2020. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 8 papers.
What it found
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The trial behind it
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Who cites it
8 citing papers in PubMed.
- Atomistic Simulations of Fe(CO)The journal of physical chemistry. C, Nanomaterials and interfaces · 2026Article
- Ligand Co-Deposition in Focused Electron Beam Induced Nanoprinting: A Predictive Composition Model.Small methods · 2026Article
- Release of Neutrals in Electron-Induced Ligand Separation from MeCpPtMeThe journal of physical chemistry. A · 2025Article
- Condensed Matter Systems Exposed to Radiation: Multiscale Theory, Simulations, and Experiment.Chemical reviews · 2024Review
- Role of Low-Energy (<20 eV) Secondary Electrons in the Extraterrestrial Synthesis of Prebiotic Molecules.ACS earth & space chemistry · 2024Article
- Role of the Molecular Environment in Quenching the Irradiation-Driven Fragmentation of Fe(CO)The journal of physical chemistry. A · 2023Article
- In Situ Time-of-Flight Mass Spectrometry of Ionic Fragments Induced by Focused Electron Beam Irradiation: Investigation of Electron Driven Surface Chemistry inside an SEM under High Vacuum.Nanomaterials (Basel, Switzerland) · 2022Article
- Irradiation-driven molecular dynamics simulation of the FEBID process for Pt(PFBeilstein journal of nanotechnology · 2021Article
Corrections and comments
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Authors and funding
8 authors.
Funding
Abstract
Focused electron beam induced deposition (FEBID) is a powerful technique for 3D-printing of complex nanodevices. However, for resolutions below 10 nm, it struggles to control size, morphology and composition of the structures, due to a lack of molecular-level understanding of the underlying irradiation-driven chemistry (IDC). Computational modeling is a tool to comprehend and further optimize FEBID-related technologies. Here we utilize a novel multiscale methodology which couples Monte Carlo simulations for radiation transport with irradiation-driven molecular dynamics for simulating IDC with atomistic resolution. Through an in depth analysis of [Formula: see text] deposition on [Formula: see text] and its subsequent irradiation with electrons, we provide a comprehensive description of the FEBID process and its intrinsic operation. Our analysis reveals that simulations deliver unprecedented results in modeling the FEBID process, demonstrating an excellent agreement with available experimental data of the simulated nanomaterial composition, microstructure and growth rate as a function of the primary beam parameters. The generality of the methodology provides a powerful tool to study versatile problems where IDC and multiscale phenomena play an essential role.
Identifiers
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Registered trials
Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.