ArticleChemistry of materials : a publication of the American Chemical Society2020
Large-Scale Synthesis of Highly Uniform Silicon Nanowire Arrays Using Metal-Assisted Chemical Etching.
Article in Chemistry of materials : a publication of the American Chemical Society, 2020. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 24 papers.
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Who cites it
24 citing papers in PubMed.
- Metal/Si Nanowire Arrays for Hot Electron Catalysis.Small (Weinheim an der Bergstrasse, Germany) · 2026Article
- Article
- Advances in Porous Silicon Materials for Sensing, Energy Storage, and Microelectronics.Nanomaterials (Basel, Switzerland) · 2026Review
- Light trapping and guided mode enhancement in perovskite/Si tandem solar cells with embedded silicon nanowires.RSC advances · 2025Article
- Durable Icephobic and Superhydrophobic Silicon Nanowire Surfaces.ACS applied materials & interfaces · 2025Article
- Optimizing Catalyst Location within Nanostructured Photoelectrodes.ACS applied materials & interfaces · 2025Article
- Tuning the spontaneous emission of CdTe quantum dots with hybrid silicon-gold nanogaps.RSC advances · 2025Article
- Scalable Fabrication of Highly Organized, Horizontally Aligned Sub-5 nm Silicon Nanowires via Chemical Vapor Etching.Small science · 2025Article
- Nanoscale Silicon Fingerprints for Counterfeit Prevention in Microchips.Small (Weinheim an der Bergstrasse, Germany) · 2025Article
- Pd-Decorated SnOSensors (Basel, Switzerland) · 2025Article
- Nanostructured Boron-Doped Ultra-Nanocrystalline Diamond Micro-Pyramids: Efficient Electrochemical Supercapacitors.Small (Weinheim an der Bergstrasse, Germany) · 2025Article
- A Fabrication Method for Realizing Vertically Aligned Silicon Nanowires Featuring Precise Dimension Control.Sensors (Basel, Switzerland) · 2024Article
- Au Nanoparticles@Si Nanowire Oligomer Arrays for SERS: Dimers Are Best.ACS applied materials & interfaces · 2024Article
- Application of p and n-Type Silicon Nanowires as Human Respiratory Sensing Device.Sensors (Basel, Switzerland) · 2023Article
- Dewetting-Assisted Patterning: A Lithography-Free Route to Synthesize Black and Colored Silicon.ACS applied materials & interfaces · 2023Article
- Antireflection Structures for VIS and NIR on Arbitrarily Shaped Fused Silica Substrates with Colloidal Polystyrene Nanosphere Lithography.Micromachines · 2023Article
- Optical Metasurfaces for Energy Conversion.Chemical reviews · 2022Review
- Self-Assembled Au Nanoparticle Monolayers on Silicon in Two- and Three-Dimensions for Surface-Enhanced Raman Scattering Sensing.ACS applied nano materials · 2022Article
- Recent Advances in Structuring and Patterning Silicon Nanowire Arrays for Engineering Light Absorption in Three Dimensions.ACS applied energy materials · 2022Review
- Electrochemical Synthesis of Plasmonic Nanostructures.Molecules (Basel, Switzerland) · 2022Review
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Authors and funding
4 authors.
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Abstract
The combination of metal-assisted chemical etching (MACE) with colloidal lithography has emerged as a simple and cost-effective approach to nanostructure silicon. It is especially efficient at synthesizing Si micro- and nanowire arrays using a catalytic metal mesh, which sinks into the silicon substrate during the etching process. The approach provides a precise control over the array geometry, without requiring expensive nanopatterning techniques. Although MACE is a high-throughput solution-based approach, achieving large-scale homogeneity can be challenging because of the instability of the metal catalyst when the experimental parameters are not set appropriately. Such instabilities can lead to metal film fracture, significantly damaging the substrate and thus compromising the nanowire array quality. Here, we report on the critical parameters that influence the stability of the metal catalyst layer for achieving large-scale homogeneous MACE: etchant composition, metal film thickness, adhesion layer thickness, nanowire diameter and pitch, metal film coverage, Si/Au/etchant interface length, and crystalline quality of the colloidal template (grain size and defects). Our results investigate the origin of the catalyst film fracture and reveal that MACE experiments should be optimized for each Si wire array geometry by keeping the etch rate below a certain threshold. We show that the Si/Au/etchant interface length also affects the etch rate and should thus be considered when optimizing the MACE experimental parameters. Finally, our results demonstrate that colloidal templates with small grain sizes (i.e., <100 μm
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