ArticleNature materials2021
Direct X-ray and electron-beam lithography of halogenated zeolitic imidazolate frameworks.
Article in Nature materials, 2021. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 36 papers.
What it found
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The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.
The trial behind it
Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.
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Who cites it
36 citing papers in PubMed.
- Tailoring Chemiresistive Nanomaterials Toward Integrated Circuit Compatible Fabrication of Gas Sensors.Advanced materials (Deerfield Beach, Fla.) · 2026Article
- Template-Assisted Synthesis of Hierarchical Gas Sensing Materials: From Structural Design to Performance Optimization.Chemistry (Weinheim an der Bergstrasse, Germany) · 2026Review
- Recent efforts of vapour-phase strategies for EUV resist toward high- and hyper-NA extreme ultraviolet lithography.Chemical science · 2026Review
- Article
- Room temperature molding of amorphous dielectrics via van der Waals anisotropy at the nanoscale.Nature communications · 2026Article
- A universal all-dry microfabrication method for sensitive electronic materials via an inorganic molecular lithographic mediator.Nature communications · 2026Article
- ZIF-71-Coated CuO:Al with Enhanced Gas-Sensing Performance forACS applied electronic materials · 2025Article
- Self-regulating and self-oscillating metal-organic framework hybrid plasmonic metasurfaces.Nature communications · 2025Article
- Twisted-stacking MOF patterns with tailorable circularly polarized luminescence properties and encryption applications.Nature communications · 2025Article
- Nanoimprinted Holographic MOF Diffraction Gratings─Advancing Selective Volatile Organic Compound Detection at Low Concentrations.ACS applied materials & interfaces · 2025Article
- Rapid fabrication of ultra-thin 2D metal-organic framework membranes for accurate gas separation.National science review · 2025Article
- Patterning and Dynamics of Structured Surfaces in Metal/Covalent Organic Frameworks and Polymer Chemistry.Topics in current chemistry (Cham) · 2025Review
- Instant Writing of Conductive Interface on MOF Single Crystal by Ultrafast Laser.Advanced science (Weinheim, Baden-Wurttemberg, Germany) · 2025Article
- Highly sensitive salinity sensing using annular one-dimensional photonic crystals.Scientific reports · 2025Article
- Sandwiching of MOF nanoparticles between graphene oxide nanosheets among ice grains.Nature communications · 2025Article
- Nanoscale Resist-Free Patterning of Halogenated Zeolitic Imidazolate Frameworks by Extreme UV Lithography.Advanced science (Weinheim, Baden-Wurttemberg, Germany) · 2025Article
- Triboelectric Nanogenerators Based on Composites of Zeolitic Imidazolate Frameworks Functionalized with Halogenated Ligands for Contact and Rotational Mechanical Energy Harvesting.ACS applied nano materials · 2025Article
- Advancements in Inkjet Printing of Metal- and Covalent-Organic Frameworks: Process Design and Ink Optimization.ACS applied materials & interfaces · 2025Review
- Uniform single-crystal mesoporous metal-organic frameworks.Nature chemistry · 2025Article
- Guiding charged particles in vacuum via Lagrange points.Nature communications · 2024Article
Corrections and comments
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Authors and funding
17 authors.
Funding
Abstract
Metal-organic frameworks (MOFs) offer disruptive potential in micro- and optoelectronics because of the unique properties of these microporous materials. Nanoscale patterning is a fundamental step in the implementation of MOFs in miniaturized solid-state devices. Conventional MOF patterning methods suffer from low resolution and poorly defined pattern edges. Here, we demonstrate the resist-free, direct X-ray and electron-beam lithography of MOFs. This process avoids etching damage and contamination and leaves the porosity and crystallinity of the patterned MOFs intact. The resulting high-quality patterns have excellent sub-50-nm resolution, and approach the mesopore regime. The compatibility of X-ray and electron-beam lithography with existing micro- and nanofabrication processes will facilitate the integration of MOFs in miniaturized devices.
Identifiers
33106648What OpenQuestion holds
Registered trials
Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.