ArticleApplied physics letters2020
Ultraminiature AlN diaphragm acoustic transducer.
Article in Applied physics letters, 2020. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 4 papers.
What it found
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The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.
The trial behind it
Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.
Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.
Who cites it
4 citing papers in PubMed.
- Design, Fabrication, Characterization, and Simulation of AlN-Based Piezoelectric Micromachined Ultrasonic Transducer for Sonar Imaging Applications.Micromachines · 2024Article
- Micro-Electro-Mechanical Systems Microphones: A Brief Review Emphasizing Recent Advances in Audible Spectrum Applications.Micromachines · 2024Review
- A High Sensitivity AlN-Based MEMS Hydrophone for Pipeline Leak Monitoring.Micromachines · 2023Article
- Design and Experimental Assessment of Low-Noise Piezoelectric Microelectromechanical Systems Vibration Sensors.IEEE sensors journal · 2021Article
Corrections and comments
PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.
Authors and funding
4 authors.
Funding
Abstract
Piezoelectric acoustic transducers consisting of a circular aluminum nitride and silicon nitride unimorph diaphragm and an encapsulated air-filled back cavity are reported. Analytical and finite element analysis models are used to design the transducer to achieve low minimum detectable pressure (MDP) within chosen size restrictions. A series of transducers with varying radii are fabricated using microelectromechanical systems (MEMS) techniques. Experimental results are reported for a transducer with a 175
Identifiers
What OpenQuestion holds
Registered trials
Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.