ArticleMicromachines2020
Wafer-Level Vacuum-Packaged Translatory MEMS Actuator with Large Stroke for NIR-FT Spectrometers.
Thilo Sandner et al.PubMed ↗Full text ↗Publisher ↗
No numbers read from the abstract.
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ArticleMicromachines2020
Thilo Sandner et al.PubMed ↗Full text ↗Publisher ↗
No numbers read from the abstract.