ArticleMicromachines2020
Towards the Fabrication of High-Aspect-Ratio Silicon Gratings by Deep Reactive Ion Etching.
Article in Micromachines, 2020. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 19 papers.
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Who cites it
19 citing papers in PubMed.
- Optimization Method for the Synergistic Control of DRIE Process Parameters on Sidewall Steepness and Aspect Ratio.Micromachines · 2025Article
- Simultaneous signal optimization of refraction and attenuation in x-ray grating interferometry: A case study for breast imaging.Medical physics · 2025Article
- Quantifying grating defects in X-ray Talbot-Lau interferometry through a comparative study of two fabrication techniques.Scientific reports · 2025Article
- Diffractive lenses for neutron techniques.Scientific reports · 2025Article
- Etching: The Art of Semiconductor Micromachining.Micromachines · 2025Article
- Implementation of a dual-phase grating interferometer for multi-scale characterization of building materials by tunable dark-field imaging.Scientific reports · 2024Article
- Editorial for the Special Issue on Recent Advances in Reactive Ion Etching and Applications of High-Aspect-Ratio Microfabrication.Micromachines · 2023Article
- Simulation and Experimental Validation of a Pressurized Filling Method for Neutron Absorption Grating.Micromachines · 2023Article
- Inductively Coupled Plasma Dry Etching of Silicon Deep Trenches with Extremely Vertical Smooth Sidewalls Used in Micro-Optical Gyroscopes.Micromachines · 2023Article
- The choice of an autocorrelation length in dark-field lung imaging.Scientific reports · 2023Article
- Self-aligned multi-layer X-ray absorption grating using large-area fabrication methods for X-ray phase-contrast imaging.Scientific reports · 2023Article
- A High-Linearity Closed-Loop Capacitive Micro-Accelerometer Based on Ring-Diode Capacitance Detection.Sensors (Basel, Switzerland) · 2023Article
- The Impact of Manufacturing Imperfections on the Performance of Metalenses and a Manufacturing-Tolerant Design Method.Micromachines · 2022Article
- Fabrication of a fractal pattern device for focus characterizations of X-ray imaging systems by Si deep reactive ion etching and bottom-up Au electroplating.Applied optics · 2022Article
- Fabrication of X-ray absorption gratings by centrifugal deposition of bimodal tungsten particles in high aspect ratio silicon templates.Scientific reports · 2022Article
- Dark-field computed tomography reaches the human scale.Proceedings of the National Academy of Sciences of the United States of America · 2022Article
- Fast acquisition protocol for X-ray scattering tensor tomography.Scientific reports · 2021Article
- Fabrication of X-ray Gratings for Interferometric Imaging by Conformal Seedless Gold Electroplating.Micromachines · 2021Article
- Bottom-Up Gold Filling in New Geometries and Yet Higher Aspect Ratio Gratings for Hard X-Ray Interferometry.Journal of the Electrochemical Society · 2021Article
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Authors and funding
4 authors.
Funding
Abstract
The key optical components of X-ray grating interferometry are gratings, whose profile requirements play the most critical role in acquiring high quality images. The difficulty of etching grating lines with high aspect ratios when the pitch is in the range of a few micrometers has greatly limited imaging applications based on X-ray grating interferometry. A high etching rate with low aspect ratio dependence is crucial for higher X-ray energy applications and good profile control by deep reactive ion etching of grating patterns. To achieve this goal, a modified Coburn-Winters model was applied in order to study the influence of key etching parameters, such as chamber pressure and etching power. The recipe for deep reactive ion etching was carefully fine-tuned based on the experimental results. Silicon gratings with an area of 70 × 70 mm
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Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.