ArticleMicromachines2020

Microfabrication Process-Driven Design, FEM Analysis and System Modeling of 3-DoF Drive Mode and 2-DoF Sense Mode Thermally Stable Non-Resonant MEMS Gyroscope.

Syed Ali Raza Bukhari et al.PubMed ↗Full text ↗Publisher ↗

No numbers read from the abstract.