Evidence map›Paper›PMID 32930906›Full record

ArticleNano convergence2020

Double-gate thin film transistor with suspended-gate applicable to tactile force sensor.

An Hoang-Thuy Nguyen, Manh-Cuong Nguyen, Seongyong Cho, Anh-Duy Nguyen, Hyewon Kim, Yeongcheol Seok, Jiyeon Yoon, Rino Choi

Abstract read
PubMed Full text at PMC Publisher
In one paragraph

Article in Nano convergence, 2020. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 1 paper.

0numbers the graph read from it
0cells of the map it votes in
1citing papers in PubMed
–field-weighted citation impact
1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

1 citing paper in PubMed.

  1. Article
4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

8 authors.

An Hoang-Thuy NguyenDepartment of Materials Science and Engineering, Inha University, Incheon, 22212, South Korea.
Manh-Cuong NguyenDepartment of Materials Science and Engineering, Inha University, Incheon, 22212, South Korea.
Seongyong ChoDepartment of Materials Science and Engineering, Inha University, Incheon, 22212, South Korea.
Anh-Duy NguyenDepartment of Materials Science and Engineering, Inha University, Incheon, 22212, South Korea.
Hyewon KimDepartment of Materials Science and Engineering, Inha University, Incheon, 22212, South Korea.
Yeongcheol SeokDepartment of Materials Science and Engineering, Inha University, Incheon, 22212, South Korea.
Jiyeon YoonDepartment of Materials Science and Engineering, Inha University, Incheon, 22212, South Korea.
Rino ChoiDepartment of Materials Science and Engineering, Inha University, Incheon, 22212, South Korea. rino.choi@inha.ac.kr.ORCID http://orcid.org/0000-0003-0604-7849

Funding

No grant is acknowledged in the PubMed record.

6 · The paper itself

Abstract

This paper presents a straightforward, low-cost, and effective integration process for the fabrication of membrane gate thin film transistors (TFTs) with an air gap. The membrane gate TFT with an air gap can be used as the highly sensitive tactile force sensor. The suspended membrane gate with an air gap as the insulator layer is formed by multiple photolithography steps and photoresist sacrificial layers. The viscosity of the photoresist and the spin speed was used to modify the thickness of the air gap during the coating process. The tactile force was measured by monitoring the drain current of the TFT as the force changed the thickness of the air gap. The sensitivity of the devices was enhanced by an optimal gate size and low Young's modulus of the gate material. This simple process has the potential for the production of small, versatile, and highly sensitive sensors.

Indexed as

Air gapMechanical sensorsMembrane gatePhotoresist sacrificeTactile force sensor

Identifiers

PMID32930906
PMCPMC7492326

What OpenQuestion holds

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LicenceCC BY
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Registered trials

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Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.