Magnetic Micro Sensors with Two Magnetic Field Effect Transistors Fabricated Using the Commercial Complementary Metal Oxide Semiconductor Process.

Wei-Ren Chen, Yao-Chuan Tsai, Po-Jen Shih, Cheng-Chih Hsu, Ching-Liang Dai

Open access · goldAbstract read

In one paragraph

Article in Sensors (Basel, Switzerland), 2020. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 3 papers.

0numbers the graph read from it

0cells of the map it votes in

3citing papers in PubMed

0.8field-weighted citation impact, top 27% of its field

1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

3 citing papers in PubMed, 13 citations in OpenAlex.

CMOS-MEMS Z-Axis Magnetic Field Sensor with an Additional Collector.Micromachines · 2026
Article
Design and Measurement of Microelectromechanical Three-Axis Magnetic Field Sensors Based on the CMOS Technique.Micromachines · 2023
Article
Manufacturing and Characterization of Three-Axis Magnetic Sensors Using the Standard 180 nm CMOS Technology.Sensors (Basel, Switzerland) · 2021
Article

4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

5 authors at 3 institutions in 1 country.

Wei-Ren ChenDepartment of Mechanical Engineering, National Chung Hsing University, Taichung 402, Taiwan.

Yao-Chuan TsaiDepartment of Bio-Industrial Mechatronics Engineering, National Chung Hsing University, Taichung 402, Taiwan.

Po-Jen ShihDepartment of Biomedical Engineering, National Taiwan University, Taipei 106, Taiwan.

Cheng-Chih HsuDepartment of Electro-Optical Engineering, National United University, Miaoli 360, Taiwan.

Ching-Liang DaiDepartment of Mechanical Engineering, National Chung Hsing University, Taichung 402, Taiwan.

National Chung Hsing University · TWNational Taiwan University · TWNational United University · TW

Funding

Ministry of Science and Technology, Taiwan 108-2221-E-005 -065 -MY2

6 · The paper itself

Abstract

The fabrication and characterization of a magnetic micro sensor (MMS) with two magnetic field effect transistors (MAGFETs) based on the commercial complementary metal oxide semiconductor (CMOS) process are investigated. The magnetic micro sensor is a three-axis sensing type. The structure of the magnetic microsensor is composed of an x/y-MAGFET and a z-MAGFET. The x/y-MAGFET is employed to sense the magnetic field (MF) in the

Indexed as

CMOSmagnetic field effect transistormagnetic microsensorMEMS

Identifiers

PMID32825769

DOI10.3390/s20174731

PMCPMC7506958

OpenAlexW3080535643

What OpenQuestion holds

Textmetadata

LicenceCC BY

Read underepoch 390

Registered trials

None linked

Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.