ArticleMaterials (Basel, Switzerland)2020
Thin Diamond Film on Silicon Substrates for Pressure Sensor Fabrication.
Article in Materials (Basel, Switzerland), 2020. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 8 papers.
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Who cites it
8 citing papers in PubMed, 25 citations in OpenAlex.
- Advances in silicon carbide pressure sensors for high-temperature extreme environment sensing.Microsystems & nanoengineering · 2026Review
- Diamond Sensor Technologies: From Multi Stimulus to Quantum.Micromachines · 2026Review
- Mechanical and Electrical Properties of Free-standing Polycrystal Diamond Membranes.Advanced science (Weinheim, Baden-Wurttemberg, Germany) · 2025Article
- All-Ceramic Fiber Fabry-Perot Cavity High-Temperature Pulsating Pressure Sensor Based on HTCC.Sensors (Basel, Switzerland) · 2025Article
- Magnetic Resonance Study of Bulky CVD Diamond Disc.Materials (Basel, Switzerland) · 2024Article
- Optical Pump-Terahertz Probe Diagnostics of the Carrier Dynamics in Diamonds.Materials (Basel, Switzerland) · 2023Article
- Fabry-Perot Pressure Sensors Based on Polycrystalline Diamond Membranes.Materials (Basel, Switzerland) · 2021Article
- Surface Modification Using Assisting Electrodes in Wire Electrical Discharge Machining for Silicon Wafer Preparation.Materials (Basel, Switzerland) · 2021Article
Corrections and comments
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Authors and funding
6 authors at 2 institutions in 2 countries.
Funding
No grant is acknowledged in the PubMed record.
Abstract
Thin polycrystalline diamond films chemically vapor deposited on thinned silicon substrates were used as membranes for pressure sensor fabrication by means of selective chemical etching of silicon. The sensing element is based on a simple low-finesse Fabry-Pérot (FP) interferometer. The FP cavity is defined by the end-face of a single mode fiber and the diamond diaphragm surface. Hence, pressure is evaluated by measuring the cavity length by an optoelectronic system coupled to the single mode fiber. Exploiting the excellent properties of Chemical Vapor Deposition (CVD) diamond, in terms of high hardness, low thermal expansion, and ultra-high thermal conductivity, the realized sensors have been characterized up to 16.5 MPa at room temperature. Preliminary characterizations demonstrate the feasibility of such diamond-on-Si membrane structure for pressure transduction. The proposed sensing system represents a valid alternative to conventional solutions, overcoming the drawback related to electromagnetic interference on the acquired weak signals generated by standard piezoelectric sensors.
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