ArticleSensors (Basel, Switzerland)2020
Design and Characterization of a Novel Biaxial Bionic Hair Flow Sensor Based on Resonant Sensing.
Article in Sensors (Basel, Switzerland), 2020. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 3 papers.
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Who cites it
3 citing papers in PubMed.
- Biomimetic hair-assisted GaN optical devices for bidirectional airflow detection.Microsystems & nanoengineering · 2024Article
- Design and Development of a Hair-like Sensor with Bridge-Type Flexible Amplification Mechanisms.Sensors (Basel, Switzerland) · 2023Article
- Piezoelectric Property of Electrospun PVDF Nanofibers as Linking Tips of Artificial-Hair-Cell Structures in Cochlea.Nanomaterials (Basel, Switzerland) · 2022Article
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Authors and funding
4 authors.
Funding
Abstract
This paper presents the design, theoretical analysis, simulation verification, fabrication and prototype characterization of a novel biaxial bionic hair flow sensor based on resonant sensing. Firstly, the device architecture, mainly consists of a polymer hair post, a silicon micro signal transducer and a glass substrate, is described, the theoretical simplified model is established and the mechanical sensitivity to air flow is deducted. Then, the structure simulations based on Ansys software are implemented to preliminarily verify the feasibility of the proposed sensor conception and optimize the structure parameters simultaneously. Subsequently, a closed-loop control scheme based on digital phase-locked loop and an amplitude demodulation algorithm of oscillatory flow velocity based on the least mean square method are proposed to transform and extract the air flow signal, and then verify it by circuit simulations based on SIMULINK. Finally, the fabricated prototype is illustrated and comprehensively tested. The tested prototype possesses an x-axis scale factor of 1.56 Hz/(m/s)
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