Evidence map›Paper›PMID 32766550›Full record

ReviewResearch (Washington, D.C.)2020

Nanoelectromechanical Sensors Based on Suspended 2D Materials.

Max C Lemme, Stefan Wagner, Kangho Lee, Xuge Fan, Gerard J Verbiest, Sebastian Wittmann, Sebastian Lukas, Robin J Dolleman, Frank Niklaus, Herre S J van der Zant and 2 more

Abstract readReview
In one paragraph

Review in Research (Washington, D.C.), 2020. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 44 papers.

0numbers the graph read from it
0cells of the map it votes in
44citing papers in PubMed
–field-weighted citation impact
1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

44 citing papers in PubMed.

  1. Energy Dissipation in WSeThe journal of physical chemistry letters · 2026
    Article
  2. Progress in Strain Engineering of 2D-Integrated Heterostructures for Ultrasensitive Sensors.Advanced science (Weinheim, Baden-Wurttemberg, Germany) · 2026
    Review
  3. Article
  4. Article
  5. Impact of Strain in Free-Standing PtSeAdvanced materials (Deerfield Beach, Fla.) · 2025
    Article
  6. Article
  7. Review
  8. Article
  9. Article
  10. Article
  11. Article
  12. Article
  13. Article
  14. Article
  15. Article
  16. Graphene MEMS and NEMS.Microsystems & nanoengineering · 2024
    Review
  17. Article
  18. Article
  19. Article
  20. Article
4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

12 authors.

Max C LemmeChair of Electronic Devices, RWTH Aachen University, Otto-Blumenthal-Str. 2, 52074 Aachen, Germany.ORCID https://orcid.org/0000-0003-4552-2411
Stefan WagnerAMO GmbH, Advanced Microelectronic Center Aachen (AMICA), Otto-Blumenthal-Str. 25, 52074 Aachen, Germany.ORCID https://orcid.org/0000-0002-6799-6709
Kangho LeeInstitute of Physics, Faculty of Electrical Engineering and Information Technology, Universität der Bundeswehr München, Werner-Heisenberg-Weg 39, 85577 Neubiberg, Germany.ORCID https://orcid.org/0000-0002-6495-5231
Xuge FanDivision of Micro and Nanosystems, KTH Royal Institute of Technology, Malvinas Väg 10, 10044 Stockholm, Sweden.ORCID https://orcid.org/0000-0002-8811-1615
Gerard J VerbiestDepartment of Precision and Microsystems Engineering, Delft University of Technology, Mekelweg 2, 2628 CD Delft, Netherlands.ORCID https://orcid.org/0000-0002-1712-1234
Sebastian WittmannInfineon Technologies AG, Wernerwerkstraße 2, 93049 Regensburg, Germany.ORCID https://orcid.org/0000-0002-5141-791X
Sebastian LukasChair of Electronic Devices, RWTH Aachen University, Otto-Blumenthal-Str. 2, 52074 Aachen, Germany.ORCID https://orcid.org/0000-0002-8062-2832
Robin J Dolleman2nd Institute of Physics, RWTH Aachen University, Otto-Blumenthal-Str., 52074 Aachen, Germany.ORCID https://orcid.org/0000-0002-6976-8443
Frank NiklausDivision of Micro and Nanosystems, KTH Royal Institute of Technology, Malvinas Väg 10, 10044 Stockholm, Sweden.ORCID https://orcid.org/0000-0002-0525-8647
Herre S J van der ZantKavli Institute of Nanoscience, Delft University of Technology, Lorentzweg 1, 2628 CJ Delft, Netherlands.ORCID https://orcid.org/0000-0002-5385-0282
Georg S DuesbergInstitute of Physics, Faculty of Electrical Engineering and Information Technology, Universität der Bundeswehr München, Werner-Heisenberg-Weg 39, 85577 Neubiberg, Germany.ORCID https://orcid.org/0000-0002-7412-700X
Peter G SteenekenDepartment of Precision and Microsystems Engineering, Delft University of Technology, Mekelweg 2, 2628 CD Delft, Netherlands.ORCID https://orcid.org/0000-0002-5764-1218

Funding

No grant is acknowledged in the PubMed record.

6 · The paper itself

Abstract

The unique properties and atomic thickness of two-dimensional (2D) materials enable smaller and better nanoelectromechanical sensors with novel functionalities. During the last decade, many studies have successfully shown the feasibility of using suspended membranes of 2D materials in pressure sensors, microphones, accelerometers, and mass and gas sensors. In this review, we explain the different sensing concepts and give an overview of the relevant material properties, fabrication routes, and device operation principles. Finally, we discuss sensor readout and integration methods and provide comparisons against the state of the art to show both the challenges and promises of 2D material-based nanoelectromechanical sensing.

Identifiers

PMID32766550
PMCPMC7388062

What OpenQuestion holds

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LicenceCC BY
Read underepoch 390

Registered trials

None linked

Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.