Geometric Nonlinear Model for Prediction of Frequency-Temperature Behavior of SAW Devices for Nanosensor Applications.

Zhenglin Chen, Qiaozhen Zhang, Congcong Li, Sulei Fu, Xiaojun Qiu, Xiaoyu Wang, Haodong Wu

Abstract read

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Article in Sensors (Basel, Switzerland), 2020. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 2 papers.

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2citing papers in PubMed

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2 citing papers in PubMed.

On the Performance Evaluation of Commercial SAW Resonators by Means of a Direct and Reliable Equivalent-Circuit Extraction.Micromachines · 2021
Article
Periodic Analysis of Surface Acoustic Wave Resonator with Dimensionally Reduced PDE Model Using COMSOL Code.Micromachines · 2021
Article

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7 authors.

Zhenglin ChenSchool of Electronic Science and Engineering, Nanjing University, Nanjing 210093, China.

Qiaozhen ZhangCollege of Information, Mechanical and Electrical Engineering, Shanghai Normal University, Shanghai 200234, China.ORCID 0000-0002-6180-6441

Congcong LiKey Laboratory of Modern Acoustics, Ministry of Education, Department of Acoustic Science and Engineering, School of Physics, Nanjing University, Nanjing 210093, China.

Sulei FuKey Laboratory of Advanced Materials (MOE), School of Materials Science and Engineering, Tsinghua University, Beijing 100084, China.

Xiaojun QiuSchool of Electronic Science and Engineering, Nanjing University, Nanjing 210093, China.

Xiaoyu WangKey Laboratory of Modern Acoustics, Ministry of Education, Department of Acoustic Science and Engineering, School of Physics, Nanjing University, Nanjing 210093, China.

Haodong WuKey Laboratory of Modern Acoustics, Ministry of Education, Department of Acoustic Science and Engineering, School of Physics, Nanjing University, Nanjing 210093, China.

Funding

Beijing Science and Technology Project D171100004617001Jiangsu Planned Projects for Postdoctoral Research Funds 2019K053National Key Research and Development Program of China 2016YFB0402704National Key Research and Development Program of China 2016YFC0104802National Natural Science Youth Foundation of China 11904233

6 · The paper itself

Abstract

Surface acoustic wave (SAW)-based sensors have become highly valued for their use as nanosensors in industrial applications. Accurate prediction of the thermal stability is a key problem for sensor design. In this work, a numerical tool based on the finite element method combined with piezoelectric Lagrangian equations has been developed to accurately predict the thermal sensitivity characteristics of surface acoustic wave devices. Theoretical analysis for the geometric nonlinearity contributing to the frequency-temperature characteristic and material constants' dependency on temperature were taken into consideration. The thermomechanical equilibrium equation built on the three-dimensional finite element method (3D-FEM) mesh node took mesh movement into account because thermal expansion was employed. The frequency-temperature characteristics of different SAW modes, including Rayleigh waves and leaky waves excited on a piezoelectric substrate of quartz or lithium tantalate, respectively, were calculated. The theoretical accuracy of the proposed numerical tool was verified by experiments.

Indexed as

geometric nonlinearityLagrangian equationsthe frequency–temperature characteristicsthermal expansionthree-dimensional periodic SAW structure

Identifiers

PMID32751406

DOI10.3390/s20154237

PMCPMC7435686

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