ArticleNanomaterials (Basel, Switzerland)2020
Tunable Infrared Metamaterial Emitter for Gas Sensing Application.
Article in Nanomaterials (Basel, Switzerland), 2020. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 16 papers.
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Who cites it
16 citing papers in PubMed.
- Wavelength-Tunable, Low-Angular Dispersion, and Narrowband Thermal Emitters by Incorporating GeACS applied materials & interfaces · 2026Article
- Coupled split square resonator based metamaterial sensor for realtime monitoring of air bubbles in IV channels.Scientific reports · 2025Article
- Tunable MEMS-based meta-absorbers for nondispersive infrared gas sensing applications.Microsystems & nanoengineering · 2025Article
- MEMS-based meta-emitter with actively tunable radiation power characteristic.Discover nano · 2024Article
- Advanced mid-infrared lightsources above and beyond lasers and their analytical utility.Analytical sciences : the international journal of the Japan Society for Analytical Chemistry · 2022Review
- A tunable color filter using a hybrid metasurface composed of ZnO nanopillars and Ag nanoholes.Nanoscale advances · 2022Article
- Electromagnetic characterization of mirror symmetric resonator based metamaterial and frequency tuning: a dielectric based multilayer approach.Scientific reports · 2022Article
- High-FOM Temperature Sensing Based on Hg-EIT-Like Liquid Metamaterial Unit.Nanomaterials (Basel, Switzerland) · 2022Article
- Electrothermally tunable terahertz cross-shaped metamaterial for opto-logic operation characteristics.iScience · 2022Article
- Selective Mid-IR Metamaterial-Based Gas Sensor System: Proof of Concept and Performances Tests.Nanomaterials (Basel, Switzerland) · 2022Article
- Design of Tunable Terahertz Metamaterial Sensor with Single- and Dual-Resonance Characteristic.Nanomaterials (Basel, Switzerland) · 2021Article
- Tunable Terahertz Metamaterial with Electromagnetically Induced Transparency Characteristic for Sensing Application.Nanomaterials (Basel, Switzerland) · 2021Article
- Realization of frequency hopping characteristics of an epsilon negative metamaterial with high effective medium ratio for multiband microwave applications.Scientific reports · 2021Article
- Tunable Narrowband Silicon-Based Thermal Emitter with Excellent High-Temperature Stability Fabricated by Lithography-Free Methods.Nanomaterials (Basel, Switzerland) · 2021Article
- Tunable Split-Disk Metamaterial Absorber for Sensing Application.Nanomaterials (Basel, Switzerland) · 2021Article
- Impact of Different Metals on the Performance of Slab Tamm Plasmon Resonators.Sensors (Basel, Switzerland) · 2020Article
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2 authors.
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Abstract
We present an on-chip tunable infrared (IR) metamaterial emitter for gas sensing applications. The proposed emitter exhibits high electrical-thermal-optical efficiency, which can be realized by the integration of microelectromechanical system (MEMS) microheaters and IR metamaterials. According to the blackbody radiation law, high-efficiency IR radiation can be generated by driving a Direct Current (DC) bias voltage on a microheater. The MEMS microheater has a Peano-shaped microstructure, which exhibits great heating uniformity and high energy conversion efficiency. The implantation of a top metamaterial layer can narrow the bandwidth of the radiation spectrum from the microheater to perform wavelength-selective and narrow-band IR emission. A linear relationship between emission wavelengths and deformation ratios provides an effective approach to meet the requirement at different IR wavelengths by tailoring the suitable metamaterial pattern. The maximum radiated power of the proposed IR emitter is 85.0 µW. Furthermore, a tunable emission is achieved at a wavelength around 2.44 µm with a full-width at half-maximum of 0.38 µm, which is suitable for high-sensitivity gas sensing applications. This work provides a strategy for electro-thermal-optical devices to be used as sensors, emitters, and switches in the IR wavelength range.
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