ReviewSensors (Basel, Switzerland)2020
Scalable and High-Throughput Top-Down Manufacturing of Optical Metasurfaces.
Review in Sensors (Basel, Switzerland), 2020. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 11 papers.
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Who cites it
11 citing papers in PubMed.
- An Integrated Physics-Based and Data-Driven Framework for Defect Prediction in Advanced Nanoimprint Lithography Toward Inorganic Semiconductor Patterning.Micromachines · 2026Article
- AI-Integrated Micro/Nanorobots for Biomedical Applications: Recent Advances in Design, Fabrication, and Functions.Biosensors · 2025Review
- Thermoplasmonic-Controlled Optical Filters Based on the Combination of Chiral Liquid Crystals and Metasurfaces.Macromolecular rapid communications · 2025Article
- Novel Fabry-Pérot Filter Structures for High-Performance Multispectral Imaging with a Broadband from the Visible to the Near-Infrared.Sensors (Basel, Switzerland) · 2025Article
- Nanophotonic Materials and Devices: Recent Advances and Emerging Applications.Micromachines · 2025Review
- Advancements in SERS: Revolutionizing Biomedical Analysis and Applications.Nanotheranostics · 2025Review
- Artificial intelligence-coupled plasmonic infrared sensor for detection of structural protein biomarkers in neurodegenerative diseases.Science advances · 2023Article
- Direct Bottom-UpChemical reviews · 2023Review
- Surface Lattice Plasmon Resonances by Direct In Situ Substrate Growth of Gold Nanoparticles in Ordered Arrays.Advanced materials (Deerfield Beach, Fla.) · 2022Article
- Enhancement of Luminous Intensity Emission from Incoherent LED Light Sources within the Detection Angle of 10° Using Metalenses.Nanomaterials (Basel, Switzerland) · 2022Article
- Recent Progress on Ultrathin Metalenses for Flat Optics.iScience · 2020Review
Corrections and comments
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Authors and funding
6 authors.
Funding
No grant is acknowledged in the PubMed record.
Abstract
Metasurfaces have shown promising potential to miniaturize existing bulk optical components thanks to their extraordinary optical properties and ultra-thin, small, and lightweight footprints. However, the absence of proper manufacturing methods has been one of the main obstacles preventing the practical application of metasurfaces and commercialization. Although a variety of fabrication techniques have been used to produce optical metasurfaces, there are still no universal scalable and high-throughput manufacturing methods that meet the criteria for large-scale metasurfaces for device/product-level applications. The fundamentals and recent progress of the large area and high-throughput manufacturing methods are discussed with practical device applications. We systematically classify various top-down scalable patterning techniques for optical metasurfaces: firstly, optical and printing methods are categorized and then their conventional and unconventional (emerging/new) techniques are discussed in detail, respectively. In the end of each section, we also introduce the recent developments of metasurfaces realized by the corresponding fabrication methods.
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Registered trials
Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.