ReviewSensors (Basel, Switzerland)2020
Micromachined Accelerometers with Sub-µg/√Hz Noise Floor: A Review.
Review in Sensors (Basel, Switzerland), 2020. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 26 papers.
What it found
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The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.
The trial behind it
Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.
Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.
Who cites it
26 citing papers in PubMed.
- Device-Level Modeling, Cross-Axis Analysis, and Optical Characterization of a Symmetric Triple-Layer MOEMS Accelerometer.Micromachines · 2026Article
- Exploring the gravito-optic effect for gravity sensing applications.Scientific reports · 2026Article
- Electrostatic anti-spring-enhanced MEMS accelerometer with auto-tuning capability.Microsystems & nanoengineering · 2025Article
- Dynamic Calibration of Quartz Flexure Accelerometers.Sensors (Basel, Switzerland) · 2025Article
- A MEMS electro-mechanical co-optimization platform featuring freeform geometry optimization based on a genetic algorithm.Microsystems & nanoengineering · 2025Article
- A miniaturized MEMS accelerometer with anti-spring mechanism for enhancing sensitivity.Microsystems & nanoengineering · 2025Article
- A Low-Power and Robust Micromachined Thermal Convective Accelerometer.Micromachines · 2024Article
- A zinc oxide resonant nano-accelerometer with ultra-high sensitivity.Nature communications · 2024Article
- Experimental Investigation of Mode Localization's Bifurcation Topology Transfer in Electrostatically Coupled Tuning Fork Resonators.Sensors (Basel, Switzerland) · 2024Article
- Near-zero stiffness accelerometer with buckling of tunable electrothermal microbeams.Microsystems & nanoengineering · 2024Article
- A Study on the Harmonic Distortion of Seismic-Grade Sigma-Delta MEMS Accelerometers Using a Multiple Degree-of-Freedom Model.Sensors (Basel, Switzerland) · 2023Article
- Multiple-Degree-of-Freedom Modeling and Simulation for Seismic-Grade Sigma-Delta MEMS Capacitive Accelerometers.Sensors (Basel, Switzerland) · 2023Article
- A Low-Noise Micromachined Accelerometer with Reconfigurable Electrodes for Resonance Suppression.Micromachines · 2023Article
- Long-Term Degradation Evaluation of the Mismatch of Sensitive Capacitance in MEMS Accelerometers.Micromachines · 2023Article
- An aerosol deposition based MEMS piezoelectric accelerometer for low noise measurement.Microsystems & nanoengineering · 2023Article
- Bias Stability Investigation of a Triaxial Navigation-Compatible Accelerometer with an Electrostatic Spring.Sensors (Basel, Switzerland) · 2022Article
- Review
- Static and dynamic analyses of free-hinged-hinged-hinged-free beam in non-homogeneous gravitational field: application to gravity gradiometry.Scientific reports · 2022Article
- Design and Modeling of Fiber-Free Optical MEMS Accelerometer Enabling 3D Measurements.Micromachines · 2022Article
- Mode-localized accelerometer in the nonlinear Duffing regime with 75 ng bias instability and 95 ng/√Hz noise floor.Microsystems & nanoengineering · 2022Article
Corrections and comments
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Authors and funding
11 authors.
Funding
Abstract
This paper reviews the research and development of micromachined accelerometers with a noise floor lower than 1 µg/√Hz. Firstly, the basic working principle of micromachined accelerometers is introduced. Then, different methods of reducing the noise floor of micromachined accelerometers are analyzed. Different types of micromachined accelerometers with a noise floor below 1 µg/√Hz are discussed. Such sensors can mainly be categorized into: (i) micromachined accelerometers with a low spring constant; (ii) with a large proof mass; (iii) with a high quality factor; (iv) with a low noise interface circuit; (v) with sensing schemes leading to a high scale factor. Finally, the characteristics of various micromachined accelerometers and their trends are discussed and investigated.
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Registered trials
Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.