ArticleIET nanobiotechnology2020
Fabrication, calibration, and preliminary testing of microcantilever-based piezoresistive sensor for BioMEMS applications.
Article in IET nanobiotechnology, 2020. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 3 papers.
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Who cites it
3 citing papers in PubMed.
- Rapid and Sensitive Detection of Severe Acute Respiratory Syndrome Coronavirus 2 in Label-Free Manner Using Micromechanical Sensors.Sensors (Basel, Switzerland) · 2021Article
- Highly selective sensor for the detection of HgIET nanobiotechnology · 2020Article
- Ultrasensitive detection of cadmium ions using a microcantilever-based piezoresistive sensor for groundwater.Beilstein journal of nanotechnology · 2020Article
Corrections and comments
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Authors and funding
3 authors.
Funding
No grant is acknowledged in the PubMed record.
Abstract
In this study, the authors demonstrate the fabrication, calibration, and testing of a piezoresistive microcantilever-based sensor for biomedical microelectromechanical system (BioMEMS) application. To use any sensor in BioMEMS application requires surface modification to capture the targeted biomolecules. The surface alteration comprises self-assembled monolayer (SAM) formation on gold (Au)/chromium (Cr) thin films. So, the Au/Cr coating is essential for most of the BioMEMS applications. The fabricated sensor uses the piezoresistive technique to capture the targeted biomolecules with the SAM/Au/Cr layer on top of the silicon dioxide layer. The stiffness (
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