ArticleNanomaterials (Basel, Switzerland)2020
Periodic Microstructures Fabricated by Laser Interference with Subsequent Etching.
Article in Nanomaterials (Basel, Switzerland), 2020. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 6 papers.
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Who cites it
6 citing papers in PubMed.
- The Evolution of Lithography: From Resolution Scaling to Manufacturing Constraints.Micromachines · 2026Review
- Cross-scale structures fabrication via hybrid lithography for nanolevel positioning.Microsystems & nanoengineering · 2025Article
- Anti-Adhesive Surfaces Inspired by Bee Mandible Surfaces.Biomimetics (Basel, Switzerland) · 2023Article
- Article
- Hybrid laser precision engineering of transparent hard materials: challenges, solutions and applications.Light, science & applications · 2021Review
- Laser Thermochemical High-Contrast Recording on Thin Metal Films.Nanomaterials (Basel, Switzerland) · 2020Article
Corrections and comments
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Authors and funding
5 authors.
Funding
Abstract
Periodic nanostructures have wide applications in micro-optics, bionics, and optoelectronics. Here, a laser interference with subsequent etching technology is proposed to fabricate uniform periodic nanostructures with controllable morphologies and smooth surfaces on hard materials. One-dimensional microgratings with controllable periods (1, 2, and 3 μm) and heights, from dozens to hundreds of nanometers, and high surface smoothness are realized on GaAs by the method. The surface roughness of the periodic microstructures is significantly reduced from 120 nm to 40 nm with a subsequent inductively coupled plasma (ICP) etching. By using laser interference with angle-multiplexed exposures, two-dimensional square- and hexagonal-patterned microstructures are realized on the surface of GaAs. Compared with samples without etching, the diffraction efficiency can be significantly enhanced for samples with dry etching, due to the improvement of surface quality.
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Registered trials
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