Modeling and Experimental Study of the Localized Electrochemical Micro Additive Manufacturing Technology Based on the FluidFM.

Wanfei Ren, Jinkai Xu, Zhongxu Lian, Peng Yu, Huadong Yu

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Article in Materials (Basel, Switzerland), 2020. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Not yet cited in PubMed.

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5 · Who and what money

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5 authors.

Wanfei RenMinistry of Education Key Laboratory for Cross-Scale Micro and Nano Manufacturing, Department of Mechanical and Electrical Engineering, Changchun University of Science and Technology, Changchun 130012, China.

Jinkai XuMinistry of Education Key Laboratory for Cross-Scale Micro and Nano Manufacturing, Department of Mechanical and Electrical Engineering, Changchun University of Science and Technology, Changchun 130012, China.

Zhongxu LianMinistry of Education Key Laboratory for Cross-Scale Micro and Nano Manufacturing, Department of Mechanical and Electrical Engineering, Changchun University of Science and Technology, Changchun 130012, China.

Peng YuMinistry of Education Key Laboratory for Cross-Scale Micro and Nano Manufacturing, Department of Mechanical and Electrical Engineering, Changchun University of Science and Technology, Changchun 130012, China.

Huadong YuMinistry of Education Key Laboratory for Cross-Scale Micro and Nano Manufacturing, Department of Mechanical and Electrical Engineering, Changchun University of Science and Technology, Changchun 130012, China.ORCID 0000-0003-0756-512X

Funding

National Natural Science Foundation of China U19A20103Overseas Expertise Introduction Project for Discipline Innovation No.D17017The Fund for Equipment Pre-Research No.61409230312

6 · The paper itself

Abstract

In this work, the localized electrochemical micro additive manufacturing technology based on the FluidFM (fluidic force microscope) has been introduced to fabricate micro three-dimensional overhang metal structures at sub-micron resolution. It breaks through the localized deposition previously achieved by micro-anode precision movement, and the micro-injection of the electrolyte is achieved in a stable electric field distribution. The structure of electrochemical facilities has been designed and optimized. More importantly, the local electrochemical deposition process has been analyzed with positive source diffusion, and the mathematical modeling has been revealed in the particle conversion process. A mathematical model is proposed for the species flux under the action of pulsed pressure in an innovatively localized liquid feeding process. Besides, the linear structure, bulk structure, complex structure, and large-area structure of the additive manufacturing are analyzed separately. The experimental diameter of the deposited cylinder structure is linearly fitted. The aspect ratio of the structure is greater than 20, the surface roughness value is between 0.1-0.2 μm at the surface of bulk structures, and the abilities are verified for deposition of overhang, hollow complex structures. Moreover, this work verifies the feasibility of 3D overhang array submicron structure additive manufacturing, with the application of pulsed pressure. Furthermore, this technology opens new avenues for the direct fabrication of nano circuit interconnection, tiny sensors, and micro antennas.

Indexed as

3D micro overhang structureFluidFMlocalized electrochemicalmicro additive manufacturing

Identifiers

PMID32575589

DOI10.3390/ma13122783

PMCPMC7345769

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Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.