ReviewMicromachines2020
Microfabrication of X-ray Optics by Metal Assisted Chemical Etching: A Review.
Review in Micromachines, 2020. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 13 papers.
What it found
Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.
The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.
The trial behind it
Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.
Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.
Who cites it
13 citing papers in PubMed.
- Interlayer-Catalyst Method for Metal-Assisted Chemical Etching of Ultra-High Aspect Ratio Silicon Nanostructures.Small methods · 2026Article
- Etching: The Art of Semiconductor Micromachining.Micromachines · 2025Article
- Au Nanoparticles@Si Nanowire Oligomer Arrays for SERS: Dimers Are Best.ACS applied materials & interfaces · 2024Article
- The Use of Nanoneedles in Drug Delivery: an Overview of Recent Trends and Applications.AAPS PharmSciTech · 2023Review
- Self-aligned multi-layer X-ray absorption grating using large-area fabrication methods for X-ray phase-contrast imaging.Scientific reports · 2023Article
- Moiré artifacts reduction in Talbot-Lau X-ray phase contrast imaging using a three-step iterative approach.Optics express · 2022Article
- Fabrication of a fractal pattern device for focus characterizations of X-ray imaging systems by Si deep reactive ion etching and bottom-up Au electroplating.Applied optics · 2022Article
- Electropolishing and Shaping of Micro-Scale Metallic Features.Micromachines · 2022Review
- Optimization of Metal-Assisted Chemical Etching for Deep Silicon Nanostructures.Nanomaterials (Basel, Switzerland) · 2021Article
- Fabrication and Characterization of Inverted Silicon Pyramidal Arrays with Randomly Distributed Nanoholes.Micromachines · 2021Article
- Fabrication of X-ray Gratings for Interferometric Imaging by Conformal Seedless Gold Electroplating.Micromachines · 2021Article
- Editorial for the Special Issue on Micro- and Nano-Fabrication by Metal Assisted Chemical Etching.Micromachines · 2020Article
- Towards the Fabrication of High-Aspect-Ratio Silicon Gratings by Deep Reactive Ion Etching.Micromachines · 2020Article
Corrections and comments
PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.
Authors and funding
2 authors.
Funding
Abstract
High-aspect-ratio silicon micro- and nanostructures are technologically relevant in several applications, such as microelectronics, microelectromechanical systems, sensors, thermoelectric materials, battery anodes, solar cells, photonic devices, and X-ray optics. Microfabrication is usually achieved by dry-etch with reactive ions and KOH based wet-etch, metal assisted chemical etching (MacEtch) is emerging as a new etching technique that allows huge aspect ratio for feature size in the nanoscale. To date, a specialized review of MacEtch that considers both the fundamentals and X-ray optics applications is missing in the literature. This review aims to provide a comprehensive summary including: (i) fundamental mechanism; (ii) basics and roles to perform uniform etching in direction perpendicular to the <100> Si substrate; (iii) several examples of X-ray optics fabricated by MacEtch such as line gratings, circular gratings array, Fresnel zone plates, and other X-ray lenses; (iv) materials and methods for a full fabrication of absorbing gratings and the application in X-ray grating based interferometry; and (v) future perspectives of X-ray optics fabrication. The review provides researchers and engineers with an extensive and updated understanding of the principles and applications of MacEtch as a new technology for X-ray optics fabrication.
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Registered trials
Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.