Evidence map›Paper›PMID 32485795›Full record

ArticleMicromachines2020

Implementation of a Single Emulsion Mask for Three-Dimensional (3D) Microstructure Fabrication of Micromixers Using the Grayscale Photolithography Technique.

Intan Sue Liana Abdul Hamid, Beh Khi Khim, Sofiyah Sal Hamid, Mohamad Faizal Abd Rahman, Asrulnizam Abd Manaf

Abstract read
In one paragraph

Article in Micromachines, 2020. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 4 papers.

0numbers the graph read from it
0cells of the map it votes in
4citing papers in PubMed
–field-weighted citation impact
1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

4 citing papers in PubMed.

  1. Review
  2. Review
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4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

5 authors.

Intan Sue Liana Abdul HamidCollaborative Microelectronic Design Excellence Center (CEDEC), Universiti Sains Malaysia (USM), Sains@USM, Pulau Pinang 11900, Malaysia.
Beh Khi KhimCollaborative Microelectronic Design Excellence Center (CEDEC), Universiti Sains Malaysia (USM), Sains@USM, Pulau Pinang 11900, Malaysia.
Sofiyah Sal HamidCollaborative Microelectronic Design Excellence Center (CEDEC), Universiti Sains Malaysia (USM), Sains@USM, Pulau Pinang 11900, Malaysia.
Mohamad Faizal Abd RahmanCollaborative Microelectronic Design Excellence Center (CEDEC), Universiti Sains Malaysia (USM), Sains@USM, Pulau Pinang 11900, Malaysia.
Asrulnizam Abd ManafCollaborative Microelectronic Design Excellence Center (CEDEC), Universiti Sains Malaysia (USM), Sains@USM, Pulau Pinang 11900, Malaysia.ORCID 0000-0002-6198-263X

Funding

Bridging Grant Universiti Sains Malaysia 304/PCEDEC/6316088Ministry of Education under FRGS Grant 203/PCEDEC/6071289Research University Grant USM 1001/PCEDEC/870050
6 · The paper itself

Abstract

Three-dimensional (3D) microstructures have been exploited in various applications of microfluidic devices. Multilevel structures in micromixers are among the essential structures in microfluidic devices that exploit 3D microstructures for different tasks. The efficiency of the micromixing process is thus crucial, as it affects the overall performance of a microfluidic device. Microstructures are currently fabricated by less effective techniques due to a slow point-to-point and layer-by-layer pattern exposure by using sophisticated and expensive equipment. In this work, a grayscale photolithography technique is proposed with the capability of simultaneous control on lateral and vertical dimensions of microstructures in a single mask implementation. Negative photoresist SU8 is used for mould realisation with structural height ranging from 163.8 to 1108.7 µm at grayscale concentration between 60% to 98%, depending on the UV exposure time. This technique is exploited in passive micromixers fabrication with multilevel structures to study the mixing performance. Based on optical absorbance analysis, it is observed that 3D serpentine structure gives the best mixing performance among other types of micromixers.

Indexed as

3D microstructuresgrayscale photolithography techniquemicromixermixing performance

Identifiers

PMID32485795
PMCPMC7345853

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Registered trials

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Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.