ReviewMicromachines2020
A Review of MEMS Capacitive Microphones.
Review in Micromachines, 2020. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 34 papers.
What it found
Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.
The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.
The trial behind it
Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.
Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.
Who cites it
34 citing papers in PubMed.
- A Study on a Sector-Shaped Cantilever Diaphragm for Frequency-Response Improvement of an Acoustic Sensor Based on Piezoresistive Effect in MOSFET.Sensors (Basel, Switzerland) · 2026Article
- Stretchable and Self-Healable Acoustic Sensor for Fast Respiratory Diseases Identification Based on Biocompatible Piezoelectric Polyester Elastomer.Small (Weinheim an der Bergstrasse, Germany) · 2026Article
- Detection of Microelectromechanical System Acoustics via Scanning Tunneling Microscopy.ACS nano · 2026Article
- Simulation and Analysis of a Silicon Membrane-Supported Beam-Island Diaphragm for Graphene Piezoresistive MEMS Microphones in High-SPL Acoustic Sensing.Micromachines · 2026Article
- From Clinical Encounter to Draft Documentation: A Mechanistic Narrative Review of Ambient Scribe Technology.Cureus · 2026Review
- From Fixed-Frequency to Tunable: Advances in Acoustic Sensors for Physiological Acoustic Monitoring.Sensors (Basel, Switzerland) · 2026Review
- A capacitive-piezoelectric hybrid MEMS microphone with signal fusion for enhancing signal-to-noise ratio.Microsystems & nanoengineering · 2026Article
- Integration of Graphene and ZnO Nanowires for a Self-Powered Piezoelectric MEMS Microphone.ACS omega · 2026Article
- Research on Flexible Sensors for Wearable Devices: A Review.Nanomaterials (Basel, Switzerland) · 2025Review
- MEMS measurement microphone compatible to P48 amplifiers.HardwareX · 2025Article
- Emerging Wearable Acoustic Sensing Technologies.Advanced science (Weinheim, Baden-Wurttemberg, Germany) · 2025Review
- The Graphene Squeeze-Film Microphone.Nano letters · 2024Article
- MEMS and ECM Sensor Technologies for Cardiorespiratory Sound Monitoring-A Comprehensive Review.Sensors (Basel, Switzerland) · 2024Review
- Advances in Portable and Wearable Acoustic Sensing Devices for Human Health Monitoring.Sensors (Basel, Switzerland) · 2024Review
- Multi-Sensor Device for Traceable Monitoring of Indoor Environmental Quality.Sensors (Basel, Switzerland) · 2024Article
- Micro-Electro-Mechanical Systems Microphones: A Brief Review Emphasizing Recent Advances in Audible Spectrum Applications.Micromachines · 2024Review
- Intelligent, Flexible Artificial Throats with Sound Emitting, Detecting, and Recognizing Abilities.Sensors (Basel, Switzerland) · 2024Review
- Highly-sensitive wafer-scale transfer-free graphene MEMS condenser microphones.Microsystems & nanoengineering · 2024Article
- Design Guidelines for Thin Diaphragm-Based Microsystems through Comprehensive Numerical and Analytical Studies.Micromachines · 2023Article
- What MEMS Research and Development Can Learn from a Production Environment.Sensors (Basel, Switzerland) · 2023Article
Corrections and comments
PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.
Authors and funding
4 authors.
Funding
No grant is acknowledged in the PubMed record.
Abstract
This review collates around 100 papers that developed micro-electro-mechanical system (MEMS) capacitive microphones. As far as we know, this is the first comprehensive archive from academia on this versatile device from 1989 to 2019. These works are tabulated in term of intended application, fabrication method, material, dimension, and performances. This is followed by discussions on diaphragm, backplate and chamber, and performance parameters. This review is beneficial for those who are interested with the evolutions of this acoustic sensor.
Indexed as
Identifiers
What OpenQuestion holds
Registered trials
Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.