ArticleSensors (Basel, Switzerland)2020
MEMS-Based Reflective Intensity-Modulated Fiber-Optic Sensor for Pressure Measurements.
Article in Sensors (Basel, Switzerland), 2020. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 8 papers.
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Who cites it
8 citing papers in PubMed.
- Review
- Recent Advances in Micro- and Nano-Enhanced Intravascular Biosensors for Real-Time Monitoring, Early Disease Diagnosis, and Drug Therapy Monitoring.Sensors (Basel, Switzerland) · 2025Review
- Review
- Optical Fiber Probe Microcantilever Sensor Based on Fabry-Perot Interferometer.Sensors (Basel, Switzerland) · 2022Review
- A Compact Optical MEMS Pressure Sensor Based on Fabry-Pérot Interference.Sensors (Basel, Switzerland) · 2022Article
- A Semi-Linear Elliptic Model for a Circular Membrane MEMS Device Considering the Effect of the Fringing Field.Sensors (Basel, Switzerland) · 2021Article
- On-Chip Chemiresistive Sensor Array for On-Road NOAdvanced science (Weinheim, Baden-Wurttemberg, Germany) · 2020Article
- Static Ice Pressure Measuring System Based on Fiber Loop Ring-Down Spectroscopy and FPGA.Sensors (Basel, Switzerland) · 2020Article
Corrections and comments
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Authors and funding
7 authors.
Funding
Abstract
A reflective intensity-modulated fiber-optic sensor based on microelectromechanical systems (MEMS) for pressure measurements is proposed and experimentally demonstrated. The sensor consists of two multimode optical fibers with a spherical end, a quartz tube with dual holes, a silicon sensitive diaphragm, and a high borosilicate glass substrate (HBGS). The integrated sensor has a high sensitivity due to the MEMS technique and the spherical end of the fiber. The results show that the sensor achieves a pressure sensitivity of approximately 0.139 mV/kPa. The temperature coefficient of the proposed sensor is about 0.87 mV/°C over the range of 20 °C to 150 °C. Furthermore, due to the intensity mechanism, the sensor has a relatively simple demodulation system and can respond to high-frequency pressure in real time. The dynamic response of the sensor was verified in a 1 kHz sinusoidal pressure environment at room temperature.
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Registered trials
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