Evidence map›Paper›PMID 32260150›Full record

ArticleMicromachines2020

Fabrication of Ultra-High Aspect Ratio (>420:1) Al

Hailiang Li, Changqing Xie

Abstract read
In one paragraph

Article in Micromachines, 2020. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 4 papers.

0numbers the graph read from it
0cells of the map it votes in
4citing papers in PubMed
–field-weighted citation impact
1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

4 citing papers in PubMed.

  1. Article
  2. Review
  3. Article
  4. Article
4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

2 authors.

Hailiang LiKey Laboratory of Microelectronic Devices & Integrated Technology, Institute of Microelectronics of Chinese Academy of Sciences, Beijing 100029, China.
Changqing XieKey Laboratory of Microelectronic Devices & Integrated Technology, Institute of Microelectronics of Chinese Academy of Sciences, Beijing 100029, China.

Funding

Ministry of Science and Technology of China 2017YFA0206002National Natural Science Foundation of China 61804169National Natural Science Foundation of China 61821091National Natural Science Foundation of China U1832217
6 · The paper itself

Abstract

We report a robust, sidewall transfer metal assistant chemical etching scheme for fabricating Al

Indexed as

Al2O3 nanotubeanisotropic dry etchingatomic layer depositiongold (Au) metal assisted chemical etchingultra-high aspect ratio

Identifiers

PMID32260150
PMCPMC7230905

What OpenQuestion holds

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Registered trials

None linked

Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.