Evidence map›Paper›PMID 32260081›Full record

ReviewSensors (Basel, Switzerland)2020

Mass Sensors Based on Capacitive and Piezoelectric Micromachined Ultrasonic Transducers-CMUT and PMUT.

H Nazemi, J Antony Balasingam, S Swaminathan, K Ambrose, M U Nathani, T Ahmadi, Y B Lopez, A Emadi

Abstract readReview
PubMed Full text at PMC Publisher
In one paragraph

Review in Sensors (Basel, Switzerland), 2020. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 17 papers.

0numbers the graph read from it
0cells of the map it votes in
17citing papers in PubMed
–field-weighted citation impact
1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

17 citing papers in PubMed.

  1. Article
  2. Article
  3. Review
  4. Article
  5. Article
  6. Article
  7. Article
  8. Review
  9. Review
  10. Review
  11. Review
  12. Article
  13. Article
  14. Review
  15. Article
  16. Review
  17. Article
4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

8 authors.

H NazemiDepartment of Electrical and Computer Engineering, University of Windsor, Windsor, ON N9B 3P4, Canada.
J Antony BalasingamDepartment of Electrical and Computer Engineering, University of Windsor, Windsor, ON N9B 3P4, Canada.
S SwaminathanDepartment of Electrical and Computer Engineering, University of Windsor, Windsor, ON N9B 3P4, Canada.
K AmbroseDepartment of Electrical and Computer Engineering, University of Windsor, Windsor, ON N9B 3P4, Canada.
M U NathaniDepartment of Electrical and Computer Engineering, University of Windsor, Windsor, ON N9B 3P4, Canada.
T AhmadiDepartment of Electrical and Computer Engineering, University of Windsor, Windsor, ON N9B 3P4, Canada.
Y B LopezDepartment of Electrical and Computer Engineering, University of Windsor, Windsor, ON N9B 3P4, Canada.
A EmadiDepartment of Electrical and Computer Engineering, University of Windsor, Windsor, ON N9B 3P4, Canada.

Funding

No grant is acknowledged in the PubMed record.

6 · The paper itself

Abstract

Microelectromechanical system (MEMS)-based mass sensors are proposed as potential candidates for highly sensitive chemical and gas detection applications owing to their miniaturized structure, low power consumption, and ease of integration with readout circuits. This paper presents a new approach in developing micromachined mass sensors based on capacitive and piezoelectric transducer configurations for use in low concentration level gas detection in a complex environment. These micromachined sensors operate based on a shift in their center resonant frequencies. This shift is caused by a change in the sensor's effective mass when exposed to the target gas molecules, which is then correlated to the gas concentration level. In this work, capacitive and piezoelectric-based micromachined sensors are investigated and their principle of operation, device structures and configurations, critical design parameters and their candidate fabrication techniques are discussed in detail.

Indexed as

capacitive micromachined ultrasonic transducer (CMUT)gas detectionlow concentrationmass sensorsmicroelectromechanical systems (MEMS)microfabricationpiezoelectric micromachined ultrasonic transducer (PMUT)volatile organic compounds (VOC)

Identifiers

PMID32260081
PMCPMC7181234

What OpenQuestion holds

Textmetadata
LicenceCC BY
Read underepoch 390

Registered trials

None linked

Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.