ArticleMicromachines2020
One-Step Femtosecond Laser Stealth Dicing of Quartz.
Article in Micromachines, 2020. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 10 papers.
What it found
Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.
The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.
The trial behind it
Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.
Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.
Who cites it
10 citing papers in PubMed, 50 citations in OpenAlex.
- Study of the Orbital Circular Cutting in Quartz Wafers Using Electrochemical Discharge Machining with Micro-Electrodes.Micromachines · 2026Article
- Enhancing Quartz Infrared Absorption by Tuning Femtosecond Laser Surface Texturing Patterns.Materials (Basel, Switzerland) · 2026Article
- Tailoring the Coefficient of Friction by Direct Laser Writing Surface Texturing.Micromachines · 2023Review
- Ppb-level NHPhotoacoustics · 2023Article
- Development of the multi-directional ablation process using the femtosecond laser to create a pattern on the lateral side of a 3D microstructure.Scientific reports · 2023Article
- Precision Layered Stealth Dicing of SiC Wafers by Ultrafast Lasers.Micromachines · 2022Article
- Editorial for the Special Issue on New Trends and Applications in Femtosecond Laser Micromachining.Micromachines · 2022Article
- Laser Fabrication of Anti-Icing Surfaces: A Review.Materials (Basel, Switzerland) · 2020Review
- Micromachining of Biolox Forte Ceramic Utilizing Combined Laser/Ultrasonic Processes.Materials (Basel, Switzerland) · 2020Article
- Micromachining of High Quality PMN-31%PT Single Crystals for High-Frequency (>20 MHz) Ultrasonic Array Transducer Applications.Micromachines · 2020Article
Corrections and comments
PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.
Authors and funding
3 authors at 2 institutions in 1 country.
Funding
Abstract
We report on a one-step method for cutting 250-µm-thick quartz plates using highly focused ultrashort laser pulses with a duration of 200 fs and a wavelength of 1030 nm. We show that the repetition rate, the scan speed, the pulse overlap and the pulse energy directly influence the cutting process and quality. Therefore, a suitable choice of these parameters was necessary to get single-pass stealth dicing with neat and flat cut edges. The mechanism behind the stealth dicing process was ascribed to tensile stresses generated by the relaxation of the compressive stresses originated in the laser beam focal volume during irradiation in the bulk material. Such stresses produced micro-fractures whose controlled propagation along the laser beam path led to cutting of the samples.
Indexed as
Identifiers
What OpenQuestion holds
Registered trials
Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.