ArticleMicrosystem technologies : sensors, actuators, systems integration2016
An optimised silicon piezoresistive microcantilever sensor for surface stress studies.
Article in Microsystem technologies : sensors, actuators, systems integration, 2016. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 3 papers.
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Who cites it
3 citing papers in PubMed.
- A Tutorial on Mechanical Sensors in the 70th Anniversary of the Piezoresistive Effect.Sensors (Basel, Switzerland) · 2024Article
- Quantitative Analysis of Piezoresistive Characteristic Based on a P-type 4H-SiC Epitaxial Layer.Micromachines · 2019Article
- Polymeric Flexible Immunosensor Based on Piezoresistive Micro-Cantilever with PEDOT/PSS Conductive Layer.Sensors (Basel, Switzerland) · 2018Article
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2 authors.
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Abstract
Surface stress is a versatile and efficient means to study various physical, chemical, biochemical and biological processes. This work focuses on developing high sensitive piezoresistive microcantilever designs to study surface stress. The cantilevers are made of silicon with rectangular holes at their base that also circumscribe a piezoresistor sensing element. To find the optimum design, the effects of change in cantilever width, rectangular hole length and type of dopant on mechanical properties like deflection, frequency and maximum stress are characterised using finite element analysis software. The surface stress sensitivity characteristics of the different cantilever designs is ascertained by applying a surface stress on their top surfaces. Results show that the sensitivity is increased by increasing the cantilever width as well as the length of the hole and the sensitivity of p-type designs is more than two times the n-type.
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