ArticleMicromachines2020
Fabrication of Random Microlens Array for Laser Beam Homogenization with High Efficiency.
Article in Micromachines, 2020. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 8 papers.
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Who cites it
8 citing papers in PubMed.
- Ultrathin Microlens Arrays for Dynamic Beam Shaping Based on 3D Lithography.Micromachines · 2026Article
- Design and Fabrication of Continuous Surface Optical Field Modulator for Angular Spectrum Discreteness Compensation.Micromachines · 2024Article
- A 256 × 256 LiDAR Imaging System Based on a 200 mW SPAD-Based SoC with Microlens Array and Lightweight RGB-Guided Depth Completion Neural Network.Sensors (Basel, Switzerland) · 2023Article
- Simulation and Experimental Research on a Beam Homogenization System of a Semiconductor Laser.Sensors (Basel, Switzerland) · 2022Article
- Fabrication of Multifocal Microlens Array by One Step Exposure Process.Micromachines · 2021Article
- Integrated Double-Sided Random Microlens Array Used for Laser Beam Homogenization.Micromachines · 2021Article
- Rapid Fabrication of Large-Area Concave Microlens Array on ZnSe.Micromachines · 2021Article
- Fabrication and Characterization of Curved Compound Eyes Based on Multifocal Microlenses.Micromachines · 2020Article
Corrections and comments
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Authors and funding
9 authors.
Funding
Abstract
The miniaturized and integrated microlens array (MLA) can effectively achieve the beam homogenization, compactness and miniaturization of laser systems. When the high-coherence laser beam is homogenized by means of using the MLA, interference fringes will occur in the homogenized light spot due to the periodicity of the MLA, which seriously affects the uniformity of the homogenized light spot. To solve this problem, a novel random microlens array (rMLA) structure was proposed for the purpose of achieving beam homogenization. The coherence in the homogenization process is suppressed by means of breaking the periodicity of the MLA. The homogenized light spot with a high energy utilization is then obtained accordingly. In the fabrication process, a clever method of combining chemical etching with lithography technology is performed to fabricate a honeycomb rMLA and a rectangular rMLA. The experimental results show that the energy utilization rate of the two types of the rMLAs is about 90%, and the uniformity of the homogenized light spots generated by the honeycomb rMLA and the rectangular rMLA are more than 80% and 85%, respectively. Meanwhile, fully cost-effective fabrication is possible to be realized.
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Registered trials
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